A differential algebra method for aberration analysis of variable-axis lens system

Zhao, J. Y.; Hu, Hangfeng; Chang, Feihao; Kang, Yongfeng

doi:10.1016/j.nima.2022.167921

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“…They trace only one electron trajectory in such a system in lieu of using the straight optical axis as a reference. Then, the linear optical properties and the geometric aberration and chromatic aberration coefficients up to the 5th rank are calculated (with high accuracy) [ 21 ].…”

Section: Introductionmentioning

confidence: 99%

First- and third-order chromatic aberrations in Glaser magnetic lens for object magnetic immersion

Amer,

Ahmad

2023

Heliyon

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Section: Introductionmentioning

confidence: 99%

First- and third-order chromatic aberrations in Glaser magnetic lens for object magnetic immersion

Amer,

Ahmad

2023

Heliyon

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A calculation approach for current density distribution evolution of secondary electrons using differential algebra method

Hu,

Li,

et al. 2024

Micron

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Comparative study on variable axis lens systems based on tapered deflectors

Zhang,

Wang,

Chen

et al. 2024

Journal of Vacuum Science &Amp; Technology B

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A variable axis lens (VAL) concept has been demonstrated an effective method to reduce aberrations of electron beam machines and has been explored to several configurations. To implement the advantages of VAL fully, it is desirable to make the axial potential distribution of the objective lens match the deflection functions of deflectors well. To our knowledge, the electrostatic deflectors applied in electron-optical systems based on VAL concept are all constructed with a “cylindrical” shape. However, when a magnetic objective lens in the VAL configurations is constructed with different radii of upper and lower pole pieces, there is a mismatch between the asymmetric lens and cylindrical deflectors, which would lead to a significant increase in aberrations. With this in mind, we have developed tapered deflectors to address the foregoing problem. A comparative study on variable axis lens systems based on conventional cylindrical deflectors and the proposed tapered ones is undertaken. Simulation results demonstrate the validity and effectiveness of the proposed VALs to reduce aberrations and an electron beam landing angle.

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A differential algebra method for aberration analysis of variable-axis lens system

Cited by 3 publications

References 16 publications

First- and third-order chromatic aberrations in Glaser magnetic lens for object magnetic immersion

First- and third-order chromatic aberrations in Glaser magnetic lens for object magnetic immersion

A calculation approach for current density distribution evolution of secondary electrons using differential algebra method

Comparative study on variable axis lens systems based on tapered deflectors

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