“…[21][22][23][24] Copper silicide nanostructures also have potential applications in microelectronic devices. [25][26][27][28][29] Finally, copper is a widely used catalyst, either pristine or as an alloy with other elements. In the case of copper silicide, the most known catalyst application is the so-called the Direct (Mu ¨ller-Rochow) process.…”
Section: Introductionmentioning
confidence: 99%
“…21–24 Copper silicide nanostructures also have potential applications in microelectronic devices. 25–29…”
A copper-based catalyst CuxSi (3<x<5) was prepared using chemical vapor deposition (CVD) of butylsilane (BuSiH3) on copper substrates. By varying the precursor flow...
“…[21][22][23][24] Copper silicide nanostructures also have potential applications in microelectronic devices. [25][26][27][28][29] Finally, copper is a widely used catalyst, either pristine or as an alloy with other elements. In the case of copper silicide, the most known catalyst application is the so-called the Direct (Mu ¨ller-Rochow) process.…”
Section: Introductionmentioning
confidence: 99%
“…21–24 Copper silicide nanostructures also have potential applications in microelectronic devices. 25–29…”
A copper-based catalyst CuxSi (3<x<5) was prepared using chemical vapor deposition (CVD) of butylsilane (BuSiH3) on copper substrates. By varying the precursor flow...
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