A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor

Shimizu, Yuki; Ishida, Ayaka; Matsuno, Yasunari; Matsukuma, Hiraku; Gao, Wei

doi:10.1007/s41871-019-00037-3

Cited by 3 publications

(2 citation statements)

References 22 publications

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“…Precision displacement sensors are essential for precision positioning systems employed in production engineering [1]. A linear encoder is one of the most common displacement sensors for high-precision positioning systems in manufacturing equipment such as NC machine tools, coordinate measuring machines (CMMs), and other equipment in production engineering [2][3][4] due to its low cost and high resolution [5]. Especially, an interferential scanning-type optical encoder with a diffraction scale grating, on which equallyspaced periodic microstructures are prepared, plays an important role in the precision positioning technology due to its high resolution [6].…”

Section: Introductionmentioning

confidence: 99%

Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer

Xiong

Matsukuma

Shimizu

et al. 2020

Meas. Sci. Technol.

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A self-calibration method, in which the wavefronts of zeroth and first-order diffracted beams from a scale grating measured by a Fizeau interferometer are employed, is applied for the evaluation of the pitch deviation of a reflective-type linear scale with a grating pitch of 2.048 μm used in a commercial interferential scanning-type optical linear encoder. One of the advantages of the self-calibration method is that the pitch deviation of a scale grating can be evaluated while measuring the out-of-flatness of the scale grating under inspection and the Z-directional out-of-flatness (surface profile) of the reference optical flat in the Fizeau interferometer. Meanwhile, in a practical case, the self-calibration method is valid under the condition where the out-of-flatness of the scale grating is on the same order or less than that of the reference optical flat in the Fizeau interferometer. In this paper, theoretical analysis and numerical calculations are thus carried out to investigate the influence of the out-of-flatness of the scale grating on measurement of the pitch deviation and the out-of-flatness of the reference optical flat. Some experiments with a linear scale from a commercial interferential scanning-type linear encoder are also carried out to verify the feasibility of the self-calibration method for the evaluation of the pitch deviation of the scale having an out-of-flatness of approximately 600 nm over the analyzed area.

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Section: Introductionmentioning

confidence: 99%

Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer

Xiong

Matsukuma

Shimizu

et al. 2020

Meas. Sci. Technol.

Self Cite

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“…On the contrary, linear encoders are relatively strong against environmental disturbances. Among several types of linear encoders [28,29,30,31], optical linear encoders can achieve a high resolution and good stability due to the short grating pitch and a short optical path length [4,28]. Although it is difficult to assure high accuracy because there are some critical issues such as a periodic error, a distortion error, and a thermal error, optical linear encoders are often employed in precision positioning systems in machine tools and measuring instruments due to their high resolutions and easy-to-use designs.…”

Section: Introductionmentioning

confidence: 99%

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Shimizu

Matsukuma

Gao

2019

Sensors

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In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.

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Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Shimizu

Mano

Murakami

et al. 2019

Precision Engineering

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A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor

Cited by 3 publications

References 22 publications

Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer

Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

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