1996
DOI: 10.1063/1.115749
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A design of reflection scanning near-field optical microscope and its application to AlGaAs/GaAs heterostructures

Abstract: A scanning near-field microscope design using the reflected light intensity as the feedback mechanism is described. Multiple fibers with high numerical apertures provide a high collection efficiency in a reflection geometry. The performance with regard to its response to large spatial variations has been tested by using a Si-grating sample and with regard to variations of local indices of refraction by using GaAs/AlGaAs heterostructure samples. In addition, spatially resolved spectroscopy on GaAs/AlGaAs hetero… Show more

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Cited by 11 publications
(7 citation statements)
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“…Other feedback schemes have successfully exploited the interferences experienced by the light exiting the NSOM tip aperture and that reflected from the sample surface to control the tip-sample distance using straight NSOM probes. [14][15][16] Here we extend these previous results to show that both small and large topography changes can be accurately imaged using a cantilevered NSOM probe employing an interferometric optical feedback method. The detection scheme incorporates a long working distance microscope to monitor the interferences between light exiting the NSOM tip aperture and that reflecting off the sample surface.…”
Section: Introductionsupporting
confidence: 74%
See 1 more Smart Citation
“…Other feedback schemes have successfully exploited the interferences experienced by the light exiting the NSOM tip aperture and that reflected from the sample surface to control the tip-sample distance using straight NSOM probes. [14][15][16] Here we extend these previous results to show that both small and large topography changes can be accurately imaged using a cantilevered NSOM probe employing an interferometric optical feedback method. The detection scheme incorporates a long working distance microscope to monitor the interferences between light exiting the NSOM tip aperture and that reflecting off the sample surface.…”
Section: Introductionsupporting
confidence: 74%
“…Figure B shows the optical approach curve measured simultaneously with the normal force curve seen in Figure A. Unlike the force approach curve which only senses the sample when the tip is nanometers from the surface, the optical approach curve begins sensing the sample while the tip is several micrometers away. , , This feature provides a mechanism for tip feedback that inherently has more flexibility in the choice of tip−sample separation.…”
Section: Resultsmentioning
confidence: 99%
“…The optical feedback signal is generated by monitoring the excitation light exiting the NSOM probe in an arrangement similar to that of previous reports (Fischer et al ., 1988; Courjon et al ., 1990; Cline & Isaacson, 1995; Guttroff et al ., 1996). The signal is collected from the side with a long‐working‐distance microscope (Infinity Photo‐Optical Company, Boulder, CO), detected with a photomultiplier tube (R1527, Hamamatsu, Bridgewater, NJ), and then sent to a lock‐in amplifier (Model SR830, Stanford Research Systems, Sunnyvale, CA) referenced to the bimorph modulation signal used to oscillate the NSOM probe.…”
Section: Methodsmentioning
confidence: 99%
“…Combining the merits of conventional far-field optical microscopy and its scanning probe counterpart, SNOM is not only capable of imaging a variety of fine structures, showing great application potentials in material science biology [2] and semiconductor technology [3], but also is able to realize local spectrum [4], fluorescence sensing [5] and single atom/molecule detection and identification [6], when incorporating spectroscopy.…”
Section: Introductionmentioning
confidence: 99%