2020
DOI: 10.1016/j.simpat.2019.102063
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A Deep Learning framework for simulation and defect prediction applied in microelectronics

Abstract: The prediction of upcoming events in industrial processes has been a longstanding research goal since it enables optimization of manufacturing parameters, planning of equipment maintenance and more importantly prediction and eventually prevention of defects. While existing approaches have accomplished substantial progress, they are mostly limited to processing of one dimensional signals or require parameter tuning to model environmental parameters. In this paper, we propose an alternative approach based on dee… Show more

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Cited by 27 publications
(13 citation statements)
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References 33 publications
(51 reference statements)
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“…We formulate the problem of finding the best augmentation policy as a discrete search problem. The operations we searched were rotation (5,10,15,20,25,30,35,40,45), flipping (horizontal and vertical), shifting (width and height), shearing range (horizontal and vertical), and zooming (1%-20%). In total, we have 46 operations in the search space.…”
Section: ) Policy Searchmentioning
confidence: 99%
See 1 more Smart Citation
“…We formulate the problem of finding the best augmentation policy as a discrete search problem. The operations we searched were rotation (5,10,15,20,25,30,35,40,45), flipping (horizontal and vertical), shifting (width and height), shearing range (horizontal and vertical), and zooming (1%-20%). In total, we have 46 operations in the search space.…”
Section: ) Policy Searchmentioning
confidence: 99%
“…As the fabrication process becomes more challenging and complicated, the number of defects increase. The processed wafer was tested using the fabrication process, detailed later on, and subsequently assisted in identifying several defects [10][11][12]. As semiconductor manufacturing becomes complicated, and the difficulty of the refined process techniques increases, a new type of wafer defect map appears.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, Zhang et al [17] proposed a modified ResNet model with an adjustment layer attached to the end. Dimitriou et al [18] proposed an algorithm based on 3D convolutional neural networks (3DCNN) in order to predict upcoming events related to suboptimal performance in a manufacturing process. However, it focuses more on the prediction of upcoming events than scanning and filtering the existing defected boards.…”
Section: Related Workmentioning
confidence: 99%
“…On the other hand, in recent years deep learning and convolutional networks have gained a lot of traction in quality control for Industry 4.0 [12] with several methods proposed for micro-electronics [13,14], metal parts manufacturing [15], visual inspection process in the printing [16], visual quality control automation on the assembly line [17], spectrophotometric color correction [18] and geometric deep lean learning to support sustainable organizational growth [19] among others.…”
Section: Introductionmentioning
confidence: 99%