Abstract:Upscaling of the mechanical properties of polycrystalline aggregates might require complex and time-consuming procedures, if adopted to help in the design and reliability analysis of micro-devices. In inertial micro electro-mechanical systems (MEMS), the movable parts are often made of polycrystalline silicon films and, due to the current trend towards further miniaturization, their mechanical properties must be characterized not only in terms of average values but also in terms of their scattering. In this wo… Show more
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