“…The USA has successfully picked up electrostatic gyroscope signals of the GP-B satellite, which obtains 10 −4 order of magnitude In terms of processes, MEMS gyroscopes still mainly adopt MEMS micromachined fabrication technologies, which are comprised of bulk fabrication and surface fabrication. For those gyroscopes in laboratory level, scientific researchers generally adopt bulk micromachined fabrication [8,10,13,18,30,31,33,34,38,59], surface micromachined fabrication [9,14,24] and mixed micromachined fabrication [12,22] to manufacture gyroscopes. Mixed micromachined fabrication means that the whole process includes not only bulk fabrication but also surface fabrication, and that method varied according to different gyroscope structures.…”