2016 Ieee Sensors 2016
DOI: 10.1109/icsens.2016.7808793
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A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology

Toshifumi Konishi
1
,
Teruaki Safu
2
,
Katsuyuki Machida
3
et al.
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Cited by 3 publications
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Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer With Gold Perforated Proof-Mass Structure

Shibata
1
,
Uchiyama
2
,
Onishi
3
et al. 2022
IEEE Sensors J.
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Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer With Gold Perforated Proof-Mass Structure

Shibata
1
,
Uchiyama
2
,
Onishi
3
et al. 2022
IEEE Sensors J.
1
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A 3-D Parallel-Plate MEMS Accelerometer with a Gold Proof Mass

Yamane
1
,
Otobe
2
,
Atsumi
3
et al. 2019
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
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A Simplified Analytical Damping Constant Model for Perforated Proof Mass Structure of MEMS Capacitive Accelerometer by Multi-Layer Metal Technology

Shibata
1
,
Uchiyama
2
,
Onishi
3
et al. 2021
2021 IEEE Sensors
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