Abstract:We present a method of free-form surface profile measurement using white-light scanning interferometry. This method is based on the principle of curvature sensor which measures the local curvature under test along a line. The profile is then reconstructed from the curvature data on the each point. Unlike subaperture-stiching method and slope detection method curvature sensing have strong points from a geometric point of view in measuring the free-form surface profile. Curvature is related to second derivative … Show more
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