2021
DOI: 10.1016/j.scitotenv.2021.147254
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A critical review on challenges and trend of ultrapure water production process

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Cited by 54 publications
(23 citation statements)
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References 95 publications
(122 reference statements)
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“…Currently, even higher water qualities are being requested [147], which means that, among others, NF membranes can be introduced to substitute the final UF polishing step. Here especially the recent development on HF NF membranes is relevant, to enable clean permeate control just as in the UF membranes.…”
Section: Ultrapure Water Productionmentioning
confidence: 99%
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“…Currently, even higher water qualities are being requested [147], which means that, among others, NF membranes can be introduced to substitute the final UF polishing step. Here especially the recent development on HF NF membranes is relevant, to enable clean permeate control just as in the UF membranes.…”
Section: Ultrapure Water Productionmentioning
confidence: 99%
“…Additionally, NF membranes can be applied when reclaimed water is used as the primary source in the ultrapure water process. The higher organic load of reclaimed water puts a strain on the current treatment schemes [147], but this can be relieved by NF processes. Currently, little attention is given to the application of NF in the ultrapure water processes, but this is expected to change in the future.…”
Section: Ultrapure Water Productionmentioning
confidence: 99%
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“…Given that during the experiment the two droplets evaporated simultaneously on hierarchical SH surfaces from the same wafer and in the same environment, we exclude that this difference may result from extrinsic contamination coming from the surface of the device or its environment. This method of concentration constitutes a simple comparative technique of the water purity that could be interesting for the semiconductor and pharmaceutical industries . An analysis of bacteria contaminating ultrapure water has already been performed by using elaborate techniques of concentration .…”
Section: Resultsmentioning
confidence: 99%
“…The cationic and anionic resins applied in a water demineralization unit, are in the H + , resp. OHform to prevent the release of other ions in the water as consequence of the IEX process [8,29,37]. However, very few comparative studies between the conventional Cl -, as used in potable water treatment, and this OHform (or FB in the case of weak basic anion exchange (WBA) resins) have been published.…”
Section: Introductionmentioning
confidence: 99%