A corrugated bridge of low residual stress for RF-MEMS switch

Electronic cooling of a submicron-sized metallic beam

“…Integrating a metallic beam with a solid state refrigerator is therefore an intriguing prospect. Suspended micrometer scale metallic beams are in use in the field of bolometers [11] and in microelectromechanical systems (MEMS) [12,13]. However, only a few examples [14,15] of suspended metallic nanostructures with tunnel junctions have been fabricated so far.…”

Micro-electro-mechanical-systems (MEMS) for assessing and monitoring civil infrastructures

“…The stiction problem can be solved by several methods, such as designing a sufficiently rigid microstructure layer and immersing the microstructure into distilled water and alcohol immediately after the etching process (Madou, 2002). A dielectric layer deposited on the top surface of the bottom electrode can also prevent complete electrical contact and stiction while still allowing current fl ow due to low impedance path (Song et al ., 2007). Another cause of the stiction is the excessive application of electrostatic load.…”

Planarization optimization of RF-MEMS switches with a gold membrane

“…Indeed, a flat metal membrane is required to increase the contact area between the bridge and the dielectric layer when the bridge is pulled down [1]. A lot of materials were used as sacrificial layer: metal [2], photoresist [3][4][5], polyimide [6], silicon oxide or phosphosilicate glass [7]. These layers and corresponding releasing techniques have a great influence on the membrane shape.…”