2011
DOI: 10.1002/jnm.770
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A conformal mapping‐based approach for fast two‐dimensional FEM electrostatic analysis of MEMS devices

Abstract: SUMMARYIn this paper, a methodology is proposed for expediting the coupled electro-mechanical two-dimensional finite element modeling of electrostatically actuated MEMS. The proposed methodology eliminates the need for repeated finite element meshing and subsequent electrostatic modeling of the device during mechanical deformation. We achieve this by mapping the deformed electrostatic domain to the reference undeformed domain 'conformally'. A 'conformal' map preserves the form of the Laplace equation and the b… Show more

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Cited by 5 publications
(3 citation statements)
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“…To optimize the design of the two sensors and the extraction of the complex permittivity of the LUTs, a numerical modeling procedure is developed by exploiting the numerical conformal-mapping (CM) analysis that is widely used in many research fields. [33][34][35][36][37] By using the numerical modeling equations to replace the traditional simulation methods, the designing procedure becomes very time-saving, only taking a few seconds. The broadband experimental characterization is performed from 10 MHz up to 50 GHz by using a conventional vector network analyzer (VNA) to measure the two-port scattering (S-) parameters.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…To optimize the design of the two sensors and the extraction of the complex permittivity of the LUTs, a numerical modeling procedure is developed by exploiting the numerical conformal-mapping (CM) analysis that is widely used in many research fields. [33][34][35][36][37] By using the numerical modeling equations to replace the traditional simulation methods, the designing procedure becomes very time-saving, only taking a few seconds. The broadband experimental characterization is performed from 10 MHz up to 50 GHz by using a conventional vector network analyzer (VNA) to measure the two-port scattering (S-) parameters.…”
Section: Introductionmentioning
confidence: 99%
“…The platform is fabricated on a low‐loss quartz substrate and both TL and IDE sensors are integrated with SU‐8 microfluidic structures for liquid confinement. To optimize the design of the two sensors and the extraction of the complex permittivity of the LUTs, a numerical modeling procedure is developed by exploiting the numerical conformal‐mapping (CM) analysis that is widely used in many research fields 33‐37 . By using the numerical modeling equations to replace the traditional simulation methods, the designing procedure becomes very time‐saving, only taking a few seconds.…”
Section: Introductionmentioning
confidence: 99%
“…The recent classes of cutting‐edge microwave devices reveal a constant interest in the achievement of advanced sensitivity, high speed, and confined‐dimension assets, which are deemed crucial for the profitable fabrication of powerful communication applications and fast network environments . Essentially, for the past decade, these components have received a remarkable momentum, because they offer ideal integration solutions and advanced performance.…”
Section: Introductionmentioning
confidence: 99%