A computational investigation of the effects of varying discharge geometry for an inductively coupled plasma

Convective scheme solution of the Boltzmann transport equation for nanoscale semiconductor devices

“…In previous work conducted for plasma simulation, complex boundaries were handled for an unstructured, triangular mesh [31] and for a mesh composed of small rectangular cells [32]. In this work, an unstructured mesh composed of triangles and quadrilaterals was implemented with an external electric field applied to the semiconductor device.…”

“…A sheet represents a cohesive unit, in which the corners (or nodes) of the sheet are moved with the same timestep for a given value of energy. The concept of the sheet was introduced in a previous implementation of the CS [31]. The timestep for a given energy shell is calculated based on the total scattering frequency for that particular case, according to…”

Kinetic description of flow past a micro-plate

“…The geometrical information can be computed via test particles, or as in [9]. The CS uses Ôlong-livedÕ moving cells (LLMC) [7,8] to compute T bal . For ÔangleÕ a 0 i;j , an LLMC is constructed, MCðc 0 ; a 0 i;j Þ, that initially overlaps the mesh cell c 0 .…”

“…where x=y nameÀmax = min are the coordinates of the mesh cell or moving cell (see [7,8] for a full description of the CS) and DM is the mesh spacing. This process of time stepping is continued down the propagating direction until the LLMC reaches the end of the propagator.…”

“…This has not been practical due to lack of computational resources in the past. In addition, accurate solution of the Boltzmann equation presents multiple difficulties which were addressed in [7,8]. In this work we develop a non-statistical (no random numbers used) kinetic model suited to these types of flows.…”