A Comprehensive Approach to Investigating Fluorine-Bearing Gas Mixtures

Abstract

An integrated method is proposed for examining the compositions of fluorine-bearing gaseous mixtures, which allows for determining the concentration of HF, F2, N2, O2, CO2, CF4, and C2F6 in these mixtures. The concentration of hydrogen fluoride is determined by its sorption on sodium fluoride followed by the determination of the fluoride ion by the potentiometric method. The lower threshold of determination of hydrogen fluoride is found to be 0.09 vol.%. The concentrations of N2, O2, CO2, CF4, and C2F6 are determined by the gas chromatographic method using a thermal conductivity detector. The proposed gas-chromatography method offers a quantitative measurement of the concentration of N2, O2, CO2, CF4, and C2F6 at the lower limits of detection of 0.008, 0.012, 0.011, 0.009, and 0.019 vol.%, respectively. Based on the developed method, the compositions of a standard fluorine-nitrogen (10 vol.%) and anodic gas samples, synthesized in a laboratory electrolyzer at the National Research Tomsk Polytechnic University and in an industrial electrochemical reactor at JSC Siberian Chemical Plant (Russia), are studied.