A comparison of vacuum-evaporated and ion-plated thin films using Auger electron spectroscopy

Walls, John M.; Hall, D. D.; Teer, D.G.; Delcea, B.L.

doi:10.1016/0040-6090(78)90386-3

Cited by 14 publications

(4 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It is known from Auger electron spectroscopy that 0.5-1.5% of the argon stays within the film. 32 Our simulation models found that 0.09-0.16% of argon remained within the film; however, a steady state has not yet been reached, so it is highly possible that an increased number of argon atoms would become trapped within the lattice as growth continues.…”

Section: B Sputter Depositionmentioning

confidence: 79%

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO₂ thin films over realistic timescales

et al. 2011

View full text Add to dashboard Cite

Results are presented for modeling the growth of TiO 2 on the rutile (110) surface. We illustrate how long time scale dynamics techniques can be used to model thin film growth at realistic growth rates. The system evolution between deposition events is achieved through an on-the-fly Kinetic Monte Carlo method, which finds diffusion pathways and barriers without prior knowledge of transitions. We examine effects of various experimental parameters, such as substrate bias, plasma density, and stoichiometry of the deposited species. Growth of TiO 2 via three deposition methods has been investigated: evaporation (thermal and electron beam), ion-beam assist, and reactive magnetron sputtering. We conclude that the evaporation process produces a void filled, incomplete structure even with the low-energy ion-beam assist, but that the sputtering process produces crystalline growth. The energy of the deposition method plays an important role in the film quality.

show abstract

Section: B Sputter Depositionmentioning

confidence: 79%

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO₂ thin films over realistic timescales

et al. 2011

View full text Add to dashboard Cite

show abstract

“…Various techniques and surface analysis tools for studying the atomic nature of a graded interface have been reported in the literature (1)(2)(3)(4)(5)(6)(7)(8)(9). Such techniques include optical microscopy, Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS), ion scattering spectroscopy (ISS), and electron microscopy.…”

Section: Introductionmentioning

confidence: 99%

“…Such techniques include optical microscopy, Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS), ion scattering spectroscopy (ISS), and electron microscopy. A number of graded interfaces, namely gold on aluminum, aluminum on titanium, indium on copper, gold on copper, gold on chromium, chromium on nickel and aluminum, andcopper on nickel have been investigated (1)(2)(3)(4)(5)(6)(7)(8)(9). Because these material pairs have solid solubility, thermal diffusion is possible.…”

Section: Introductionmentioning

confidence: 99%

“…Because these material pairs have solid solubility, thermal diffusion is possible. A few attempts iaave been madtj to detect and analyze the interface for materials where diffusion is negligible (9). The surface analysis techniques used in the present study were X-ray photoelectron spectroscopy (XPS), depth profiling, and microhardness depth profiling (10, 11).…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Tribological characteristics of gold films deposited on metals by ion plating and vapor deposition

Miyoshi

Spalvins

Buckley

1986

Wear

View full text Add to dashboard Cite

Composition–Depth profiling and interface analysis of surface coatings using ball cratering and the scanning auger microprobe

Walls

Hall

Sykes

1979

Surface & Interface Analysis

View full text Add to dashboard Cite

The provision of accurate composition-depth profiles to depths >1 p m is important in the characterization and investigation of thick films, surface coatings, surface treatments and many other technologically important applications. At present, such profiles are usually achieved by sequential ion bombardment and surface analysis and hence involve many difficulties in interpretation due to the non-uniform erosion of surfaces under ion bombardment. in this paper a method of obtaining accurate depth profiles is described using a ball-cratering device. The method employs a rotating ball to fashion a well-defined spherical crater in the sample surface, the depth and width of which can be accurately controlled. The specimen is then cleaned in situ using a scanning ion beam for a short period and the composition-depth profile is obtained either by point-by-point analysis down the sloping sides of the crater wall or by using Auger line-scan techniques across the crater. Coating-su'bstrate interface analysis can also be obtained by sputter-depth profiling at a point on the coating close to the exposed substrate. The method is not only considerably faster than ion etching, but the resulting depth profile also has a well-defined depth resolution. Composition-depth profiles through nitrocarburized mild steel surfaces and protective surface coatings are presented to illustrate the usefulness of the technique.

show abstract

A comparison of vacuum-evaporated and ion-plated thin films using Auger electron spectroscopy

Cited by 14 publications

References 10 publications

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO₂ thin films over realistic timescales

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO₂ thin films over realistic timescales

Tribological characteristics of gold films deposited on metals by ion plating and vapor deposition

Composition–Depth profiling and interface analysis of surface coatings using ball cratering and the scanning auger microprobe

Contact Info

Product

Resources

About

A comparison of vacuum-evaporated and ion-plated thin films using Auger electron spectroscopy

Cited by 14 publications

References 10 publications

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO2 thin films over realistic timescales

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO2 thin films over realistic timescales

Tribological characteristics of gold films deposited on metals by ion plating and vapor deposition

Composition–Depth profiling and interface analysis of surface coatings using ball cratering and the scanning auger microprobe

Contact Info

Product

Resources

About

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO₂ thin films over realistic timescales

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO₂ thin films over realistic timescales