2018
DOI: 10.1007/s10853-018-2400-7
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A comparison of the thermal decomposition mechanism of wurtzite AlN and zinc blende AlN

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Cited by 7 publications
(5 citation statements)
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“…In Figure 4A, the V-shaped groove on the surface of the AlN is edged with precipitated aluminum at a shallow depth, and it can be concluded that the laser causes the AlN to decompose and precipitate solid aluminum, corresponding to Equation (2). Therefore, the width w is related to the ablation threshold of the AlN ceramic, the measurement reference of which is shown as the white line in Figure 4A.…”
Section: Methodsmentioning
confidence: 97%
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“…In Figure 4A, the V-shaped groove on the surface of the AlN is edged with precipitated aluminum at a shallow depth, and it can be concluded that the laser causes the AlN to decompose and precipitate solid aluminum, corresponding to Equation (2). Therefore, the width w is related to the ablation threshold of the AlN ceramic, the measurement reference of which is shown as the white line in Figure 4A.…”
Section: Methodsmentioning
confidence: 97%
“…Aluminum nitride (AlN) ceramic has good comprehensive properties such as reliable insulation, low dielectric loss, good mechanical properties, and thermal conductivity. Therefore, this material is regarded as a new generation of high‐performance ceramic material and is widely used as substrate materials for high‐power electronic devices 1–3 . But AlN ceramic needs metallization to form a conductive metal layer.…”
Section: Introductionmentioning
confidence: 99%
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“…The thermodynamic equilibrium patterns, based on the Gibbs free energy minimization principle, were used to estimate the thermodynamic equilibrium components in the system. This software has been used widely in many fields such as chemistry, chemicals, materials, and environmental protection. …”
Section: Methodsmentioning
confidence: 99%
“…1. Экстраполируя данные [25] по диссоциации нитрида алюминия в область низких давлений, получаем, что при давлении 7,73•10 -4 Па темпера-Рис. 3.…”
Section: обсуждение результатовunclassified