“…Capacitive sensors are probably among the most commonly used devices for micro/nano precision measurement applications, like precision bearings, fabrication of optical devices and semiconductors, organ systems, and information storages [ 1 , 2 , 3 , 4 , 5 ]. The intrinsic advantages of capacitive sensors include their fast dynamic response, proven high resolution for relatively simple structure, and effective cost [ 6 ]. Encoder-like capacitive sensors have been growing as an alternative for displacement measurement compared to conventional capacitive sensors in the last few decades, whose incremental periodic pattern makes them particularly suitable for large scale displacement measurement [ 6 , 7 ].…”