A comparative study on MEMS piezoelectric microgenerators

Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; Salleh, Hanim

doi:10.1007/s00542-010-1086-9

Cited by 22 publications

(9 citation statements)

References 12 publications

(39 reference statements)

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“…polyvinylidene fluoride) and ceramics (e.g. sodium potassium niobate, lead zirconate titanate and barium titanate) [8][9][10]. As can be seen from Table 1, PZT in polycrystalline form has the highest strain coefficient [11][12].…”

Section: Theory and Design Conceptmentioning

confidence: 99%

Finite Element Simulation of Mems Piezoelectric Energy Scavenger Based on PZT Thin Film

Ralib¹,

Zulfakher²,

Rahim³

et al. 2019

IIUMEJ

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Vibration energy harvesting has been progressively developed in the advancement of technology and widely used by a lot of researchers around the world. There is a very high demand for energy scavenging around the world due to it being cheaper in price, possibly miniaturized within a system, long lasting, and environmentally friendly. The conventional battery is hazardous to the environment and has a shorter operating lifespan. Therefore, ambient vibration energy serves as an alternative that can replace the battery because it can be integrated and compatible to micro-electromechanical systems. This paper presents the design and analysis of a MEMS piezoelectric energy harvester, which is a vibration energy harvesting type. The energy harvester was formed using Lead Zicronate Titanate (PZT-5A) as the piezoelectric thin film, silicon as the substrate layer and structural steel as the electrode layer. The resonance frequency will provide the maximum output power, maximum output voltage and maximum displacement of vibration. The operating mode also plays an important role to generate larger output voltage with less displacement of cantilever. Some designs also have been studied by varying height and length of piezoelectric materials. Hence, this project will demonstrate the simulation of a MEMS piezoelectric device for a low power electronic performance. Simulation results show PZT-5A piezoelectric energy with a length of 31 mm and height of 0.16 mm generates maximum output voltage of 7.435 V and maximum output power of 2.30 mW at the resonance frequency of 40 Hz. ABSTRAK: Penuaian tenaga getaran telah berkembang secara pesat dalam kemajuan teknologi dan telah digunakan secara meluas oleh ramai penyelidik di seluruh dunia. Terdapat permintaan yang sangat tinggi di seluruh dunia terhadap penuaian tenaga kerana harganya yang lebih murah, bersaiz kecil dalam satu sistem, tahan lama dan mesra alam. Manakala, bateri konvensional adalah berbahaya bagi alam sekitar dan mempunyai jangka hayat yang lebih pendek. Oleh itu, getaran tenaga dari persekitaran lebih sesuai sebagai alternatif kepada bateri kerana ia mudah diintegrasikan dan serasi dengan sistem mikroelektromekanikal. Kertas kerja ini membentangkan reka bentuk dan analisis tenaga piezoelektrik MEMS iaitu salah satu jenis penuaian tenaga getaran. Penuai tenaga ini dibentuk menggunakan Lead Zicronate Titanate (PZT-5A) sebagai lapisan filem tipis piezoelektrik, silikon sebagai lapisan substrat dan keluli struktur sebagai lapisan elektrod. Frekuensi resonans akan memberikan hasil tenaga maksima, voltan tenaga maksima dan getaran jarak maksima. Mod pengendalian juga memainkan peranan penting bagi menghasilkan tenaga yang lebih besar. Reka bentuk yang mempunyai ketinggian dan panjang berlainan juga telah diuji dengan menggunakan bahan piezoelektrik yang sama. Oleh itu, projek ini akan menghasilkan simulasi piezoelektrik MEMS yang sesuai digunakan bagi alat elektronik berkuasa rendah. Hasil simulasi menunjukkan dengan panjang 31 mm dan ketinggian 0.16 mm, piezoelektrik PZT ini menghasilkan voltan maksima sebanyak 7.435 V dan tenaga output maksima 2.30 mW pada frekuensi resonans 40 Hz.

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Section: Theory and Design Conceptmentioning

confidence: 99%

Finite Element Simulation of Mems Piezoelectric Energy Scavenger Based on PZT Thin Film

Ralib¹,

Zulfakher²,

Rahim³

et al. 2019

IIUMEJ

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“…The resonance frequency is determined by acoustic phase velocity, which is strongly influenced by the selection of the substrate material [21]. Piezoelectric materials can be divided into three types: polycrystalline ceramics (LiNbO 3 and LiTaO 3 ), piezoelectric single crystal materials (quartz), and piezoelectric thin films (ZnO and AlN) [22]. The uniformity of ferroelectric materials such as LiNbO 3 and LiTaO 3 is crucial because these materials need polarization and optimal orientation at specified Euler angles [8].…”

Section: Piezoelectricitymentioning

confidence: 99%

Silicon Compatible Acoustic Wave Resonators: Design, Fabrication and Performance

Ralib¹,

Nordin²

2014

IIUMEJ

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Continuous advancement in wireless technology and silicon microfabrication has fueled exciting growth in wireless products. The bulky size of discrete vibrating mechanical devices such as quartz crystals and surface acoustic wave resonators impedes the ultimate miniaturization of single-chip transceivers. Fabrication of acoustic wave resonators on silicon allows complete integration of a resonator with its accompanying circuitry.Â Integration leads to enhanced performance, better functionality with reduced cost at large volume production. This paper compiles the state-of-the-art technology of silicon compatible acoustic resonators, which can be integrated with interface circuitry. Typical acoustic wave resonators are surface acoustic wave (SAW) and bulk acoustic wave (BAW) resonators.Â Performance of the resonator is measured in terms of quality factor, resonance frequency and insertion loss. Selection of appropriate piezoelectric material is significant to ensure sufficient electromechanical coupling coefficient is produced to reduce the insertion loss. The insulating passive SiO2 layer acts as a low loss material and aims to increase the quality factor and temperature stability of the design. The integration technique also is influenced by the fabrication process and packaging.Â Packageless structure using AlN as the additional isolation layer is proposed to protect the SAW device from the environment for high reliability. Advancement in miniaturization technology of silicon compatible acoustic wave resonators to realize a single chip transceiver system is still needed. ABSTRAK: Kemajuan yang berterusan dalam teknologi tanpa wayar dan silikon telah menguatkan pertumbuhan yang menarik dalam produk tanpa wayar. Saiz yang besar bagi peralatan mekanikal bergetar seperti kristal kuarza menghalang pengecilan untuk merealisasikan peranti cip. Silikon serasiÂ gelombang akustik resonator mempunyai potensi yang besar untuk menggantikan unsur-unsur diskret kerana keupayaan untuk mengintegrasikan dengan litar yang disertakan itu. Integrasi ini membawa kepada peningkatan prestasi, fungsi yang lebih baik dengan pengurangan kos pada pengeluaran jumlah yang besar. Oleh itu, Karya ini mengkaji silikon resonator akustik yang serasi, yang bersepadu dengan muka litar untuk membolehkan integrasi yang lengkap. Resonator gelombang akustik yang digunakan adalah gelombang permukaan akustik ( SAW ) dan gelombang akustik pukal ( BAW ) resonator . Kriteria penting untuk menilai prestasi resonator seperti faktor kualiti, frekuensi resonans dan kehilangan sisipan juga digariskan dalam setiap kerja sebelumnya. Pemilihan bahan piezoelektrik yang sesuai adalah penting untuk memastikan pekali gandingan elektromekanik yang mencukupi dihasilkan untuk mengurangkan kehilangan sisipan. Lapisan tambahan pasif SiO2Â Â yang bertindak sebagai bahan rendah sisipan dipercayai meningkatkan faktor kualiti dan kestabilan suhu reka bentuk. Teknik integrasi juga dipengaruhi oleh proses fabrikasi dan pembungkusan. Struktur tanpa pembungkusan menggunakan AlN sebagai lapisan pengasingan tambahan itu dicadangkan untuk melindungi peranti SAW dari persekitaran untuk kebolehpercayaan yang tinggi. Banyak lagi kemajuan perlu dilakukan dalam pengecilan silikon serasi resonator gelombang akustik untuk merealisasikan sistem cip transceiver tunggal.KEYWORDS: RF-MEMS; piezoelectric; resonator; surface acoustic wave (SAW);bulk acoustic wave (BAW); FBAR

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“…If we limit the consideration on piezoelectric harvesters, so called inertial transducers are cantilever structures (bending beams, often with a separate seismic mass), performing oscillations and thereby structural deformations resulting from inertial forces under external kinematic excitation. Unfortunately, a vast majority of previously investigated piezoelectric harvester architectures is poorly suited for human-induced EH, because of one central drawback: Resonant, underdamped mass-spring-damper systems are tested under laboratory conditions with artificial, forced, harmonic vibrations with high, narrow-band excitation frequencies, ( [3][4] [6][7] [15]). Especially for harmonic excitations, harvesters are designed for a specific energy source with a certain frequency (according to the sources resonant scheme).…”

Section: Excitation Sprectrum Of Human Body and Eye Movementsmentioning

confidence: 99%

AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation

et al. 2011

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This work aims for utilizing human ocular motion for the self-sufficient power supply of a minimally invasive implantable monitoring system for intraocular pressure (IOP). With a proven piezoelectric functionality (d(33) > 5 pm/V), nanocrystalline thin films of aluminum nitride (AlN) provide a good capability for micromechanical energy harvesting (EH) in medical applications. Many d31-mode microcantilever architectures are poorly suited for human-induced EH: Resonant mass-spring-damper systems are tested under high, narrow-band excitation frequencies. However, human motions, e.g. vibrations of eyeballs are marked by their low frequency, unpredictable, mainly aperiodic and time-varying signature. Different vibration types and directions are 3-dimensionally superimposed. Saccadic eye movements are favorable for inertial microgenerators because of their high dynamic loading w

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A comparative study on MEMS piezoelectric microgenerators

Cited by 22 publications

References 12 publications

Finite Element Simulation of Mems Piezoelectric Energy Scavenger Based on PZT Thin Film

Finite Element Simulation of Mems Piezoelectric Energy Scavenger Based on PZT Thin Film

Silicon Compatible Acoustic Wave Resonators: Design, Fabrication and Performance

AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation

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