A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Matoy, Kurt; Schönherr, Helmut; Detzel, Thomas; Schöberl, Thomas; Pippan, Reinhard; Motz, Christian; Dehm, Gerhard

doi:10.1016/j.tsf.2009.07.143

Cited by 221 publications

(92 citation statements)

References 35 publications

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“…Another approach is to create a micro-scale specimen, typically using techniques such as focus ion beam milling [10] [18], micro-electron-discharge machining and laser ablation, and then deform the specimens by a non-sharp tip nano-indenter such as a conical or flat punch that has a large diameter compared with the local microstructure, or a purpose-built loading probe [19]. The tests can be undertaken either ex situ under an optical microscope [11] or in situ within a scanning electron microscope [10] and/or an atomic force microscope [12]. A range of test geometries have been adopted including pillar compression, single cantilever bending, clamped cantilever bending, double cantilever bending and uniaxial tension [19][18] [10].…”

Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

“…In these cases, the specimen manufacture process is more complicated than that adopted for conventional nano-indentation, but it is possible to obtain a measure of elastic modulus, yield, tensile and flexural strength, fracture toughness and fracture energy, e.g. by introducing a Chevron notch using low-current focus ion beam line milling [12].…”

Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

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Deformation and fracture of carbonaceous materials using in situ micro-mechanical testing

Liu

Flewitt

2017

Carbon

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General rightsThis document is made available in accordance with publisher policies. Please cite only the published version using the reference above. This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.Deformation and fracture of carbonaceous materials using in situ micro-mechanical testing AbstractThe local mechanical properties of vitreous carbon and another three porous graphite materials have been investigated using a novel in situ micro-cantilever bending approach.Vitreous carbon is used for validation of the micro-mechanical measurements. Filter graphite is a single phase material with ~52 vol.% porosity. Gilsocarbon graphite is a nuclear-grade graphite that is currently used in the advanced gas-cooled reactors in the UK with ~20 vol.% porosity in the filler particles and matrix; Pile Grade-A graphite (PGA) was extracted from a fuel brick within a Magnox reactor core with 15% weight loss due to neutron irradiation and CO 2 radiolytic oxidation. The 'true' material properties obtained at micro-scale are found to be of much higher value than those measured at the macro-scale due to different failure controlling mechanisms. In particular for the PGA graphite, the micro-mechanical tests allowed the mechanical properties of the filler particles and matrix to be measured separately.The filler particles showed a higher stiffness and flexural strength compared with the matrix indicating the different influence of neutron irradiation on these two constituents. It is demonstrated here that the local mechanical properties of carbonaceous materials with various complex microstructures and even following neutron irradiation can be successfully evaluated.

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Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

Deformation and fracture of carbonaceous materials using in situ micro-mechanical testing

Liu

Flewitt

2017

Carbon

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“…Nanoindentation induced deformation of microscale structures fabricated using focused ion beam (FIB) milling has been increasingly utilised for investigating the properties of thin films [15,16]. The deformation of a well-defined structure milled into a microscale feature of interest, allows the feature to be studied under a simple, quantifiable stress-state.…”

Section: Introductionmentioning

confidence: 99%

Inducing stable interfacial delamination in a multilayer system by four-point bending of microbridges

Mead

Huang

2017

Surface and Coatings Technology

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The ability to produce stable delamination of thin film multilayer interfaces is a powerful tool for studying the interfacial adhesion within microsystems. In this study, a technique involving the four-point bending of microbridges was applied to initiate stable interfacial delamination within a multilayer system. Microscale pre-notched bridges with clamped-ends were machined into an Al/SiN/GaAs multilayer using focus ion beam milling. A square flat-end indenter was used to induce bending of the bridge by two contact locations. Bridge failure occurred via substrate fracture at the pre-notch, followed by crack deflection, and stable interfacial delamination of the SiN/GaAs interface. Substrate fracture and delamination were identified within the obtained load-displacement curves as a pop-in and region of linear load reduction respectively.

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“…Even at the micron and submicron length scale, various studies [1][2][3][4][5][6][7][8] have shown that versatile fracture experiments can be adequately evaluated. Rectangular beams with and without notches were prepared in diamond-like carbon coatings by Schaufler et al 2 to investigate the fracture toughness and the interface strength of their films with a thickness below 1 lm.…”

Section: Introductionmentioning

confidence: 99%

“…Rectangular beams with and without notches were prepared in diamond-like carbon coatings by Schaufler et al 2 to investigate the fracture toughness and the interface strength of their films with a thickness below 1 lm. Matoy et al 3 used a similar geometry and investigated among other things the fracture toughness of passivated silicon based thin films. Various geometries such as cantilevers, double-cantilevers, clamped beams, and pillars were applied by Jaya et al 5 in silicon to compare the fracture toughness obtained by different geometries and evaluation methods.…”

Section: Introductionmentioning

confidence: 99%

Fracture toughness evaluation of NiAl single crystals by microcantilevers—a new continuous J-integral method

et al. 2016

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The fracture toughness of NiAl single crystals is evaluated with a new method based on the Jintegral concept. The new technique allows the measurement of continuous crack resistance curves at the microscale by continuously recording the stiffness of the microcantilevers with a nanoindenter. The experimental procedure allows the determination of the fracture toughness directly at the onset of stable crack growth. Experiments were performed on notched microcantilevers which were prepared by focused ion beam milling from NiAl single crystals. Stoichiometric NiAl crystals and NiAl crystals containing 0.14 wt% Fe were investigated in the so-called "hard" orientation. The fracture toughness was evaluated to be 6.4 6 0.5 MPa m 1/2 for the stoichiometric sample and 7.1 6 0.5 MPa m 1/2 for the iron containing sample, indicating that the addition of iron enhances the ductility. This effect is intensified with ongoing crack propagation where the Fe-containing sample exhibits a stronger crack resistance behavior than the stoichiometric NiAl single crystal. These findings are in good agreement with macroscopic fracture toughness measurements, and validate the new micromechanical testing approach.

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A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Cited by 221 publications

References 35 publications

Deformation and fracture of carbonaceous materials using in situ micro-mechanical testing

Deformation and fracture of carbonaceous materials using in situ micro-mechanical testing

Inducing stable interfacial delamination in a multilayer system by four-point bending of microbridges

Fracture toughness evaluation of NiAl single crystals by microcantilevers—a new continuous J-integral method

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