A compact new-concept ellipsometer for accurate large scale thin film measurements

Abstract

We report on the realization of a small optical module for inspection of dimensional and physical properties of thin films materials on a large-area scale. The device, which can measure sample sizes of about 1 m × 0.5 m, uses a structured beam as optical probe, with different polarization states across the beam section. The design, realization, physical modelling, expected performances and the first results are reported.