A Compact Low-Loss 6-bit DMTL Phase Shifter Using a Novel Three-State Unit Cell

Teymoori, Mir Majid; Dousti, Massoud; Afrang, Saeid

doi:10.1007/s00034-022-01985-w

Cited by 1 publication

(1 citation statement)

References 26 publications

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“…In recent years, filters have become a new research hotspot, and some filters based on new materials and new theories have emerged, such as filters based on graphene materials [ 1 ], filters based on silicon nitride [ 2 , 3 ], filters based on photon quantum theory [ 4 , 5 ], the mathematical model of filters [ 6 ], and filters integrated with a micro-electro-mechanical system (MEMS) switch [ 7 , 8 , 9 , 10 ]. The radio frequency of a micro-electro-mechanical system (RF MEMS) tunable filter, which is a type of electronic component that controls signals by RF MEMS switches, and offers higher integration, lower power dissipation, smaller size, better linearity, and better performance in frequency adjustment than conventional filters [ 11 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

Zhang

Min

2023

Micromachines

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The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor points. The micromachine characteristics of the filter could be optimized to change the center frequency from 8.5 to 12 GHz by improving the geometrical parameters; other electrical parameters of the filter, such as stopband rejection, insertion loss, and return loss at each center frequency, were simulated and calculated. In order to evaluate the MEMS filter design methodology, a filter working at 10.5 GHz fabricated with an aluminum top electrode was used, and it displayed a low insertion loss of 1.12 dB and a high stopband rejection of 28.3 dB. Compared with the simulation results, these proposed filter showed better electrical performance. Our results demonstrated that the filter with the integrated RF MEMS switch not only provides the benefit of reduced size compared with a traditional filter, but also improves stopband rejection, insertion loss, and return loss.

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