A Compact, High‐Performance, and Deformation‐Resilient Trielectrode Electrostatic Soft Pump for Soft Robotics

Abstract

Fluid‐driven soft robotic systems, typically powered by bulky and rigid pumps, face significant limitations in agility and adaptability. Addressing this, various soft pumps have been developed, aiming to achieve better compatibility with soft robotics while ensuring sufficient performance. However, finding an optimal balance between flow rate, pumping pressure, efficiency, and the ability to seamlessly integrate with soft robotic structures remains challenging. Herein, a trielectrode electrostatically driven soft pump is presented, featuring a central diaphragm for active bidirectional pumping of gases and dielectric liquids. This design surpasses previous dual‐electrode soft pumps in electrostatic driving frequency, offering an improved flow rate of up to 330 mL min−1 and pressure of 15.96 kPa, within a compact form measuring 5.42 cm3 in volume and weighing only 11.2 g. In addition, constructed entirely from compliant materials, this pump is fully functional under bending, compression, and torsion, enhancing its integration with soft robotics. To demonstrate its practical utility, the pump is integrated into a soft gripper, enabling the manipulation of various objects. The introduced trielectrode design enables high‐frequency electrostatic actuation, resulting in a compact, high‐performance, and deformation‐resilient soft pump, advancing highly integrated and practical soft robotics.