A CMUT-based gas density sensor with high sensitivity

Abstract

the measurement of fluid density can provide basic data for scientific research of fluid mechanics, thermo-physical science, industrial control, energy, power and other engineering applications [2][3][4].To ensure product quality, saving energy, reducing raw materials and strengthening economic accounting, there is a wide range of requirements for the measurement and control of various gas media in modern process automation, which makes gas density measurement with high-precision