A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material

Carballo, V.M. Blanco; Fransen, M.; Graaf, H. van der; Lu, Jiwu; Schmitz, Jurriaan

doi:10.1016/j.nima.2010.10.143

Cited by 6 publications

(1 citation statement)

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“…InGrid and GEMGrid-like devices also 2021 JINST 16 P08022 refer to this material as an insulating spacer [10,11]. At the same time, other materials such as Silicon oxide can be employed [12]. However, the drawback is the high stress in the material interface due to the shrinkage whilst curing.…”

Section: Introductionmentioning

confidence: 99%

SU-8 processing improvement and simulating studies for a Micromegas detector fabrication

Sampaio¹,

Marinho²,

Cabruja³

et al. 2021

J. Inst.

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This paper reports the manufacturing methodology to produce an electron multiplier, a Micromegas device, integrated onto a micro-pixel readout anode using a Silicon wafer as a holder. It describes the improvement in the processing of the insulating grid material SU-8 and electrical tests with the device. For the latter purpose, simulations with Garfield++ are carried out to predict the detector response for different gas mixtures. The Micromegas detector sandwich proposed in this work presents a series of problems, which we have addressed and discussed within this paper. The temperature control throughout the processing of SU-8 is extremely important, to be able to develop it. When developing the final SU-8 layer, we have used an extra photoresist, which combined with the SU-8, resulted in a much-improved shape of the Micromegas SU-8 hole-grid. Electrical testes are performed in order to verify the signals produced by a 55Fe radioactive source. A gas gain about 1,3 × 102, using Ar/C2H6 (75/25) mixture, is achieved for the prototype manufactured.

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Section: Introductionmentioning

confidence: 99%