“…The monitoring of various parameters such as cellular potential, impedance, and optical responses in real time was achieved in each individually configured and controlled pixel, enabling a sensor array to monitor multiple cellular physiological properties at the single pixel level, radically extending our abilities to study digital physiology and pathology of cells and tissues. However, despite various previously reported multimodal CMOS biosensor arrays [8,9,14,16,17,[43][44][45][46][47][48][49][50][51][52] and considering their higher complexity compared to single-modal biosensors, there is still a great need to significantly advance multimodal CMOS biosensors arrays with higher pixel density, higher sampling rate, improved area efficiency, higher yield during post-CMOS processing, optimized electrodes for biological interfacing, and new reconfigurable sensing/actuation modalities. These desired features will enable next-generation digital physiology/pathology cellular characterization platforms to extract a vast assortment of different physiological information from various cells under various settings, including those with fast physiological characteristics, such as neuron/cardiac cells.…”