A charge balancing accelerometer interface with electrostatic damping

Yucetas, Mikail; Aaltonen, Lasse; Pulkkinen, Mika; Salomaa, Jarno; Kalanti, Antti; Halonen, K.

doi:10.1109/esscirc.2011.6044964

Cited by 4 publications

(2 citation statements)

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“…According to the mechanism verified so far, various measures can be adopted to suppress the nonlinearity of the accelerometer. For example, it is optional to reduce the Q-factor of accelerometers to a proper value such as 0.707 [ 26 , 27 , 28 , 29 , 30 ] to prevent nonlinearity deterioration stimulated at resonance. We chose to enlarge the drive electrode width by a few times, and simultaneously lower the Q-factor by one order of magnitude.…”

Section: Experiments and Resultsmentioning

confidence: 99%

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers

Zhang,

Li,

Wang

et al. 2023

Micromachines

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The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS accelerometer equipped with an area-variation-based capacitive displacement transducer. Our findings indicate that the second-order nonlinearity coefficient is dependent on the frequency but the VRE remains constant when the displacement amplitude of the excitation is maintained at a constant level. This frequency dependence of nonlinearity is a result of several factors coupling with each other during signal conversion from acceleration to electrical output signal. These factors include the amplification of the proof mass’s amplitude as the excitation frequency approaches resonance, the nonlinearity in capacitance-displacement conversion at larger displacements caused by the fringing effect, and the offset of the mechanical suspension’s equilibrium point from the null position of the differential capacitance electrodes. Through displacement transducer and damping optimization, the second-order nonlinearity coefficient is greatly reduced from mg/g2 to μg/g2.

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Section: Experiments and Resultsmentioning

confidence: 99%

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers

Zhang,

Li,

Wang

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…Continuous-time implementations of closed-loop systems have also been reported in the literature to attain linearity, suppress large displacements, or manage the sensor to work beyond the pull-in region. The most extensively used compensators for establishing a closed-loop continuous interface are PI [ 12 ], PD [ 13 , 14 , 15 ], and sliding mode controllers. Another research reported by Sarraf [ 16 ] implemented a D controller for handling a Q of 2000.…”

Section: Introductionmentioning

confidence: 99%

A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

Ahmed,

Duruaku,

Edalatfar

et al. 2023

Micromachines

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We present a high-performance capacitive accelerometer with a sub-µg noise limit and 1.2 kHz bandwidth for particle acceleration detection applications. The low noise of the accelerometer is achieved through a combination of device design optimization and operation under vacuum to reduce the effects of air damping. Operation under vacuum, however, causes amplification of signals around the resonance region, potentially resulting in incapacitating it through saturation of interface electronics or nonlinearities and even damage. The device has thus been designed with two sets of electrodes for high and low electrostatic coupling efficiency. During normal operation, the open-loop device utilizes its high-sensitivity electrodes to provide the best resolution. When a strong signal near resonance is detected, the electrodes with low sensitivity are used for signal monitoring, while the high-sensitivity electrodes are used to apply feedback signals efficiently. A closed-loop electrostatic feedback control architecture is designed to counteract the large displacements of the proof mass near resonance frequency. Therefore, the ability to reconfigure electrodes lets the device be used in high-sensitivity or high-resiliency modes. Several experiments were conducted with DC and AC excitation at different frequencies to verify the effectiveness of the control strategy. The results showed a ten-fold reduction of displacement at resonance in the closed-loop arrangement compared to the open-loop system with a quality factor of 120.

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