Abstract:Laser beam testing of integrated circuits is still largely an unexploited field. Optical beam induced currents (OBIC) effect generated by light absorption and the resulting electron hole pair creation yields useful information by supplying current changes. By means of the subsequent signal processing logic state, detection using the OBIC effect in CMOS circuits becomes possible by irradiating the drain/substrate junction with the focused laser spot. As an approach towards automated contactless testing the syst… Show more
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