A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die

Tez, Serdar; Aykutlu, Ulas; Torunbalcı, Mustafa Mert; Akın, Tayfun

doi:10.1109/jmems.2015.2451079

Cited by 66 publications

(23 citation statements)

References 20 publications

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“…Current state-of-the-art low g MEMS accelerometers are capable of sensing sub mg accelerations with noise densities of around 0.1 mg/Hz 1/2 or less. [3][4][5] A typical MEMS accelerometer proof-mass is roughly one microgram, meaning the devices are capable of resolving forces below 1 pN. Such force sensitivity is comparable to the performance of an atomic force microscope (AFM) but is realized on a single mm-scale chip and costs just tens of dollars per device.…”

Section: Introductionmentioning

confidence: 99%

Building a Casimir metrology platform with a commercial MEMS sensor

et al. 2019

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The Casimir Effect is a physical manifestation of quantum fluctuations of the electromagnetic vacuum. When two metal plates are placed close together, typically much less than a micron, the long wavelength modes between them are frozen out, giving rise to a net attractive force between the plates, scaling as d −4 (or d −3 for a spherical-planar geometry) even when they are not electrically charged. In this paper, we observe the Casimir Effect in ambient conditions using a modified capacitive micro-electromechanical system (MEMS) sensor. Using a feedback-assisted pick-and-place assembly process, we are able to attach various microstructures onto the post-release MEMS, converting it from an inertial force sensor to a direct force measurement platform with pN (piconewton) resolution. With this system we are able to directly measure the Casimir force between a silver-coated microsphere and gold-coated silicon plate. This device is a step towards leveraging the Casimir Effect for cheap, sensitive, room temperature quantum metrology.

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Section: Introductionmentioning

confidence: 99%

Building a Casimir metrology platform with a commercial MEMS sensor

et al. 2019

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“…Besides, this accelerometer could not differentiate accelerations of different axes and could not realize the axis direction of the applied acceleration. A three-axis accelerometer composed of three separate accelerometers was presented in (Tez et al 2015). This structure had three separate parts with around 0.4mm 2 surface area.…”

Section: Introductionmentioning

confidence: 99%

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

2020

Informacije MIDEM

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In this paper a three-axis capacitor accelerometer has been designed, analyzed and optimized using microelectromechanical systems technology. The accelerometers are generally divided into three categories of single axis, two axes, and three axes in terms of their ability to measure acceleration. In the suggested structure, acceleration measurements are carried out on all three axes simultaneously using a mass and spring system, which makes it possible to achieve a high sensitivity at a low occupancy level without losing other accelerator factors. By taking difference in this structure, it is shown that each axis acceleration has a very low impact on the measured acceleration of the other two axes. If any external factor changes the value of a single capacitor, the original output of the capacitor does not change for detecting acceleration. In other words, the acceleration of any of these three axes, due to its designing features, does not influence the other two axes and the system performance cannot be disrupted by external factors. The other important characteristics of the accelerometers are dynamic range, operating frequency and sensitivity. This study covers a dynamic range up to 1000g and an operating frequency up to 20 kHz. The accelerometer sensitivity is 4 fF/g in the z axis direction while it is 9 fF/g in the x and y axes directions. In this paper, the simulation of the structure is performed using Intellisuite software. Moreover, a multi-objective genetic optimization algorithm has been used to determine the dimensions of the constituents of the spring and the weight.

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“…The basic principle of operation of a MEMS accelerometer is to measure the proof-mass displacement caused by the applied acceleration. Several technologies can be used to measure this displacement, such as capacitive technology [5][6][7], piezoelectric-based approaches [8], piezoresistive-sensing methods [9], and magnetic and optical techniques [10,11]. Each sensing technology not only provides several advantages but also suffers from some drawbacks.…”

Section: Introductionmentioning

confidence: 99%

Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

2018

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This paper proposes a novel graphene‐based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and integrated optical waveguides. The proposed accelerometer provides several advantages, such as negligible cross‐axis sensitivity, appropriate linearity behavior in the operation range, a relatively broad measurement range, and a significantly wider bandwidth when compared with other important contributions in the literature. Furthermore, the functional characteristics of the proposed device are designed analytically, and are then confirmed using numerical methods. Based on the simulation results, the functional characteristics are as follows: a mechanical sensitivity of 1,019 nm/g, an optical sensitivity of 145.7 %/g, a resonance frequency of 15,553 Hz, a bandwidth of 7 kHz, and a measurement range of ±10 g. Owing to the obtained functional characteristics, the proposed device is suitable for several applications in which high sensitivity and wide bandwidth are required simultaneously.

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A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die

Cited by 66 publications

References 20 publications

Building a Casimir metrology platform with a commercial MEMS sensor

Building a Casimir metrology platform with a commercial MEMS sensor

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

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