A boundary element analysis of transmission-line parameters using singular elements

Igarashi, Hajime; Mizuyama, Yosuke; Honma, Tetsuo

doi:10.1109/20.497331

Cited by 7 publications

(1 citation statement)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In order to overcome this problem, various methods have been developed. In general, these methods can be categorized into three main groups, namely, the adaptive mesh refinement techniques [12,13], the singular element approach [14,15] and the singular function method [16,17]. The adaptive mesh refinement techniques treat the singularity problem in an indirect manner, either by using smaller elements (h-or rrefinement) or higher order basis functions ( p-refinement) near the singular regions.…”

Section: Introductionmentioning

confidence: 99%

Singular elements for electro-mechanical coupling analysis of micro-devices

Ong

Lee

Lim

2003

J. Micromech. Microeng.

View full text Add to dashboard Cite

The boundary element method is widely used in the electrostatic analysis of micro-electro-mechanical systems (MEMS) in order to determine the capacitance and electrostatic forces. However, the standard elements with low-order polynomial basis functions cannot produce accurate solutions in the vicinity of sharp corners and edges. This paper describes the formulation of new singular elements and their application to electromechanical coupling analysis. These singular elements are specially designed to handle the singularities in the potential gradient at sharp corners and edges, thereby improving the accuracy of the electrostatic analysis of the simulations of MEMS devices. Numerical simulations of micro-beam switches, comb-drive and micro-mirror are conducted, and the effects of using the singular elements are investigated.

show abstract