This paper describes 80-94 GHz and 70-77 GHz I-Q phase shifters and the corresponding transmitter and receiver ICs, fabricated in 65-nm CMOS and SiGe BiCMOS technologies, respectively. Lumped inductors and transformers are employed to realize small-form factor 90 • hybrids as needed in high density phased arrays. The CMOS transmitter operates with a saturated output power of +3 dBm and exhibits maximum absolute phase and amplitude errors of 14 • and 5.5 dB, respectively, when the phase is varied from 0 • to 360 • in steps of 22.5 • . The absolute phase error in the SiGe BiCMOS receiver is less than 8 • , with a maximum gain imbalance below 3 dB over its 3-dB bandwidth of 70-77 GHz. The peak gain and power consumption are 3.8 dB and 142 mW from 1.2 V supply for the CMOS transmitter, and 17 dB and 128 mW from 1.5 V and 2.5 V supplies for the SiGe BiCMOS receiver.Index Terms-mm-wave phase shifter, phase interpolation, CMOS weighted adder, BiCMOS variable gain amplifier.