2000 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.00CH37056)
DOI: 10.1109/isscc.2000.839703
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A 660 MHz 64b SOI processor with Cu interconnects

Abstract: The 64b PowerPC RISC microprocessor previously described is migrated from a 0.22µm SOI technology to a 0.18µm SOI technology [1]. Key features of the 0.77 scaled 1.5V technology are 0.08µm NFET channel lengths, 7 layer Cu metallization with low-e dielectric, low dose SOI substrate for improved material quality and productivity, and local interconnect. Dual gate oxide provides high I/O voltage compatibility. As this chip is a migration only 6 levels of metal and stacked devices for high voltage I/O were used.

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Cited by 6 publications
(7 citation statements)
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“…Increased understanding of how SOI devices behave, and possible solutions to their quirks has lead to a wider acceptance of SOI in the VLSI community. Recently, SOI has been used in a number of high-end microprocessor designs, e.g., IBM Power PC [11], [12], HP-PA 8700 [13], and others [14], [15], as well as other high-performance logic circuits [16]- [18]. The manufacturing process of SOI is very similar to that of bulk CMOS.…”
Section: A Silicon-on-insulator (Soi)mentioning
confidence: 99%
“…Increased understanding of how SOI devices behave, and possible solutions to their quirks has lead to a wider acceptance of SOI in the VLSI community. Recently, SOI has been used in a number of high-end microprocessor designs, e.g., IBM Power PC [11], [12], HP-PA 8700 [13], and others [14], [15], as well as other high-performance logic circuits [16]- [18]. The manufacturing process of SOI is very similar to that of bulk CMOS.…”
Section: A Silicon-on-insulator (Soi)mentioning
confidence: 99%
“…Among the phenomena contributing to uncertainty in a bulk-Si design ( Table 2) are intrachip process variation (about 15-20% of gate delay); delay variation caused by top vs. bottom switching devices in NAND gates, or the number of simultaneous "1"s arriving at a NOR gate (about 20 -35%); on-chip circuit supply voltage (V DD ) variations (about 10%), and temperature variations (on-chip and ambient, which can cause 10 -20% change in delay). The SOI-induced uncertainty in delay, while not negligible, is no larger than other sources of uncertainty on a chip, and can be managed in a similar fashion [13]. At the microprocessor level, the history effect in SOI is much less noticeable [13][14][15] than the uncertainty in delay of a simple circuit block in SOI (i.e., an inverter or a NOR stage).…”
Section: Figurementioning
confidence: 99%
“…The SOI-induced uncertainty in delay, while not negligible, is no larger than other sources of uncertainty on a chip, and can be managed in a similar fashion [13]. At the microprocessor level, the history effect in SOI is much less noticeable [13][14][15] than the uncertainty in delay of a simple circuit block in SOI (i.e., an inverter or a NOR stage). The processor cycle time (or the chip frequency) is usually determined by a few cyclelimiting paths (i.e., the longest latch-to-latch delay).…”
Section: Figurementioning
confidence: 99%
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“…A number of high end microprocessor designs have recently been implemented in SOI, e.g. HP-PA 8700 [5], IBM Power PC [6][7] [8], and others [9] [10].…”
Section: Silicon-on-insulatormentioning
confidence: 99%