A 65nm Cryogenic CMOS Design and Performance at 4.2K for Quantum State Controller Application
Munehiro Tada,
Koichiro Okamoto,
Takahisa Tanaka
et al.
Abstract:A performance evaluation of cryogenic CMOS circuit at liquid-helium temperature (4.2K) is conducted using a standard 65nm bulk CMOS for quantum state controller (QSC) applications. The ON-current (Ion) of the core n/pMOSFET are increased by 25% and 9% with excellent gate modulation (Ion/Ioff=~10 9 ). The cryogenic characteristics of copper interconnects in the back end of the line (BEOL), including line and via resistances, capacitances, and Joule-heating effect (JHE) are accurately assessed. The interconnect … Show more
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