A semi-distributed step attenuator with low insertion loss and low phase distortion is presented with 0.18 µm BiCMOS process, which is implemented with a step distributed attenuator for 0-7 dB attenuation with low insertion loss and two :-type switched resistive attenuation modules for large attenuation amplitude. The proposed attenuator has a maximum attenuation range of 0-31 dB with 1 dBincrease at the frequency range of 10-20 GHz and involves less than 8.6 dB of insertion loss. The RMS amplitude error and insertion phase at each attenuation state are less than 0.6 dB and 3°, respectively.