2022
DOI: 10.1088/1674-1056/ac0e23
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A 4H-SiC merged P–I–N Schottky with floating back-to-back diode

Abstract: A novel 4H-SiC merged P–I–N Schottky (MPS) with floating back-to-back diode (FBD), named FBD-MPS, is proposed and investigated by the Sentaurus technology computer-aided design (TCAD) and analytical model. The FBD features a trench oxide and floating P-shield, which is inserted between the P+/N– (PN) junction and Schottky junction to eliminate the shorted anode effect. The FBD is formed by the N-drift/P-shield/N-drift and it separates the PN and Schottky active region independently. The FBD reduces not only th… Show more

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