A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction

Abstract

A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device.

Electrostatic repulsive out-of-plane actuator using conductive substrate

“…Micro out-of-plane electrostatic actuators are among the most important microelectromechanical systems (MEMS) devices, and have been widely applied in radio frequency (RF) MEMS 1 2 3 4 and optical MEMS 5 6 7 . Compared with thermal and piezoelectric actuators, electrostatic actuators have the advantages of fast response, low power consumption, and hysteresis-free characteristics 8 9 .…”

Preface: Micro-Nano Technology

“…An article in the optical MEMS (MOEMS) area introduces a 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction. 39 For Power MEMS, the research of performance comparison of dye-sensitized solar cells by using different metal oxide coated TiO 2 as the photoanode 40 and simulation and testing of a micro electromagnetic energy harvester for self-powered system 41 are highlighted. The investigation of nano-Pt and Pt-based alloys electrocatalysts for direct methanol fuel cells and their properties are reported.…”