A 3D Printed Ti6Al4V Alloy Uniaxial Capacitive Accelerometer

Zega, Valentina; Martinelli, Luca; Casati, Riccardo; Zappa, Emanuele; Langfelder, Giacomo; Cigada, Alfredo; Corigliano, Alberto

doi:10.1109/jsen.2021.3095760

Cited by 5 publications

(4 citation statements)

References 31 publications

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“…In the study of uniaxial capacitive accelerometers, Zega et al simulated the frequencies of combs of cantilevers. The results have good agreements when a reduced thickness is considered [20]. Sharma et.al proposed an analytical model for static and dynamic pull-in of curled microcantilevers and found an excellent agreement of the present results [21].…”

Section: Introductionsupporting

confidence: 81%

Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed

et al. 2023

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For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage and actuation speed. Three-dimensional electromechanical modeling including many non-linearities has been performed to study some static but mainly dynamic features. The results show that the involved parameters have different influences on the actuation speed and pull-in voltage: lower length, higher thickness as well as lower density and higher Young’s modulus of material diminish the actuation time, while longer length, smaller thickness, and smaller Young’s modulus reduce the actuation voltages. Shorter actuation times and smaller actuation voltages cannot be obtained and optimized simultaneously. Different metals such as Au, Ag, Cu, Ti, Ni, Al, W, Cr, Ta, and Mo as well as artificial metals are studied and compared. In this study, Al is found to be the best material for achieving shorter actuation times and smaller actuation voltages. The design rules of MEMS cantilevers are derived considering the large variety of studied parameters. Many involved non-linearities are discussed in detail influencing the MEMS dynamics. Finally, the actuation times are related to the existing experimental actuation times of optical MEMS shutters and MEMS cantilevers.

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Section: Introductionsupporting

confidence: 81%

Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed

et al. 2023

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“…AM is a promising approach to produce small-sized, complex three-dimensional structures in titanium for MEMS. For example, Zega et al [ 116 ] produced the first uniaxial Ti-6Al-4V alloy accelerometer, fabricated through the laser powder bed fusion (L-PBF) technique, since it allows one to achieve good mechanical properties and a good resolution. The device shows a good performance in terms of sensitivity, so it can overcome the main limitation of polymer-based 3D-printed sensors, since Ti-6Al-4V shows a much better thermal behaviour, which makes it a promising solution for harsh environment applications.…”

Section: Materials For Am Fabrication Of Memsmentioning

confidence: 99%

3D-Printed MEMS in Italy

Aronne,

Bertana,

Schimmenti

et al. 2024

Micromachines

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MEMS devices are more and more commonly used as sensors, actuators, and microfluidic devices in different fields like electronics, opto-electronics, and biomedical engineering. Traditional fabrication technologies cannot meet the growing demand for device miniaturisation and fabrication time reduction, especially when customised devices are required. That is why additive manufacturing technologies are increasingly applied to MEMS. In this review, attention is focused on the Italian scenario in regard to 3D-printed MEMS, studying the techniques and materials used for their fabrication. To this aim, research has been conducted as follows: first, the commonly applied 3D-printing technologies for MEMS manufacturing have been illustrated, then some examples of 3D-printed MEMS have been reported. After that, the typical materials for these technologies have been presented, and finally, some examples of their application in MEMS fabrication have been described. In conclusion, the application of 3D-printing techniques, instead of traditional processes, is a growing trend in Italy, where some exciting and promising results have already been obtained, due to these new selected technologies and the new materials involved.

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“…5b) and fused deposition modeling (FDM), yielding acceptable sensitivities of 11.98572 mV/g and 13 µVs 2 /m, respectively [92,93]. Furthermore, a uniaxial Ti6Al4V alloy accelerometer has been proposed that uses laser powder bed fusion (L-PBF), which is small in size and exhibits a sensitivity of 184 fF/g [94].…”

Section: Accelerometersmentioning

confidence: 99%

4D printing of soft orthoses for tremor suppression

et al. 2022

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Tremor is an involuntary and oscillatory movement disorder that makes daily activities difficult for affected patients. Hand tremor-suppression orthoses are noninvasive, wearable devices designed to mitigate tremors. Various studies have shown that these devices are effective, economical, and safe; however, they have drawbacks such as large weight, awkward shape, and rigid parts. This study investigates different types of tremor-suppression orthoses and discusses their efficiency, mechanism, benefits, and disadvantages. First, various orthoses (with passive, semi-active, and active mechanisms) are described in detail. Next, we look at how additive manufacturing (AM) has progressed recently in making sensors and actuators for application in tremor orthoses. Then, the materials used in AM are further analyzed. It is found that traditional manufacturing problems can be solved with the help of AM techniques, like making orthoses that are affordable, lighter, and more customizable. Another concept being discussed is using smart materials and AM methods, such as four-dimensional (4D) printing, to make orthoses that are more comfortable and efficient. Graphic abstract

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A 3D Printed Ti6Al4V Alloy Uniaxial Capacitive Accelerometer

Cited by 5 publications

References 31 publications

Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed

Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed

3D-Printed MEMS in Italy

4D printing of soft orthoses for tremor suppression

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