A 3 mu m pitch multilevel interconnect system for VLSI devices

Monk, John; Keith, A Corzine; Albano, R.A.; Samuels, B.C.; Riley, Paul E.; Blaha, F.; Cricchi, J.R.

doi:10.1109/vmic.1988.14176

1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference

DOI: 10.1109/vmic.1988.14176

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A 3 mu m pitch multilevel interconnect system for VLSI devices

John Monk

A Corzine Keith

R.A. Albano

et al.

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A 3 mu m pitch multilevel interconnect system for VLSI devices

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