SUMMARYWe present the initial results of a cytometer that uses an array of extruded high-performance dielectrophoretic traps to capture, hold, and selectively release multiple single bioparticles. We have fabricated small arrays of traps and demonstrated single-bead and single-cell trapping, electrically switched bead release from single traps, fluorescence microscopy of trapped viable single cells, and quantitatively predicted trap strength.