A 25–75-MHz RF MEMS Tunable Filter

Entesari, Kamran; Obeidat, Khaled; Brown, Andrew R.; Rebeiz, Gabriel M.

doi:10.1109/tmtt.2007.908674

Cited by 71 publications

(37 citation statements)

References 10 publications

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“…The enhanced switch model for the metal-contact switch reported in [16] is valid but the bondwire inductance and landing pad capacitance are recalculated for RT/Duroid substrate between 0.5 and 3 GHz. The changes in microstrip line width around the MEMS switch and the transition from microstrip line to bondwire results in an additional external inductance (4 nH) which is in series with the switch (Fig.…”

Section: B Filter Designmentioning

confidence: 99%

“…Each resonator has a 56 kX resistor connected to ground to prevent any direct current (DC) floating nodes which could result in electrostatic discharge across the switch. Each switch has a separate DC coupling R-C filter (R 5 10 kX, C 5 10 pF, f c 5 1.6 MHz) for added isolation between DC and RF signals [16]. Inductively-loaded RF MEMS Filters Figure 4 shows the fabricated filter and Figure 5 shows the simulated and measured results.…”

Section: Fabrication and Measurementmentioning

confidence: 99%

“…Nonlinear characterization of a tunable filter using metal-contact switches from Radant MEMS Inc. has been described in [16] and the filter third-order intermodulation level has been found to be below the noise level of the spectrum analyzer. The measured IIP3 is shown to be greater than 65 dBm and proves that filters using RF MEMS switches have excellent linearity compared to Schottky varactor-diode tunable filters (IIP3 of 15-25 dBm) [17] and pin-diode switches filters (IIP3 of 25-35 dBm) [18].…”

Section: Fabrication and Measurementmentioning

confidence: 99%

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Inductively-loaded RF MEMS reconfigurable filters

Sekar

Entesari

2009

Int J RF and Microwave Comp Aid Eng

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This article presents an inductively loaded radio frequency (RF) microelectromechanical systems (MEMS) reconfigurable filter with spurious suppression implemented using packaged metal-contact switches. Both simulation and measurement results show a two-state, two-pole 5% filter with a tuning range of 17% from 1.06 GHz to 1.23 GHz, an insertion loss of 1.56-2.28 dB and return loss better than 13 dB over the tuning range. The spurious passband response in both states is suppressed below 220 dB. The unloaded Q of the filter changes from 127 to 75 as the filter is tuned from 1.06 GHz to 1.23 GHz. The design and full-wave simulation of a two-bit RF MEMS tunable filter with inductively loaded resonators and monolithic metal-contact MEMS switches is also presented to prove the capability of applying the inductive-loading technique to multibit reconfigurable filters. The simulation results for a two-bit reconfigurable filter show 2.5 times improvement in the tuning range compared with the two-state reconfigurable filter due to lower parasitics associated with monolithic metal-contact MEMS switches in the filter structure.

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Section: B Filter Designmentioning

confidence: 99%

Section: Fabrication and Measurementmentioning

confidence: 99%

Section: Fabrication and Measurementmentioning

confidence: 99%

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Inductively-loaded RF MEMS reconfigurable filters

Sekar

Entesari

2009

Int J RF and Microwave Comp Aid Eng

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“…The reported device types include switches, impedance tuners, tunable or reconfigurable filters, phase shifters and MEMS-based antennas [1][2][3][4][5][6][7][8]. However, it is hard to find a report on wireless devices playing a similar role of motor or actuator with continuously moving parts, because the principles based on rotating electric or magnetic field and independent electric and magnetic circuits will never work in RF or microwave frequency.…”

Section: Introductionmentioning

confidence: 99%

Electromagnetic Force on Anisotropic-Conducting Film

Xia¹

2016

PIER Letters

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Abstract-Electromechanical interaction between slow electromagnetic wave and anisotropicconducting film is investigated. The physical effects associated with anisotropic-conducting film are revealed by electromagnetic theory and validated by experiment, and they have established the working principles for a class of electromechanical sensors and/or actuators, which have continuously moving part, and are sensitive to the amplitude and the direction of electromagnetic forces or fields and well able to reflect the resonance characteristics. The revealed and validated physical effects may have significance in quite different science and engineering fields and in wide frequency bands from RF to optics.

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“…Alternatively, metamaterial transmission lines (i.e., artificial lines consisting of a host line loaded with reactive elements) have been revealed as good candidates in order to improve the performance of conventional distributed passive devices [4] [5] . In order to predict the behaviour of these structures, several works have been developed to achieve accurate electrical models of RF-MEMS tunable filters [6] [7] and tunable metamaterial transmission lines in PCB [8] . In this paper a switchable stop-band filter based on RF-MEMS metamaterials and its complete electrical model is shown.…”

Section: Introductionmentioning

confidence: 99%