A 2-DOF Monolithic Compliant Rotation Platform Driven by Piezoelectric Actuators

Liang, Cunman; Wang, Fujun; Huo, Zhichen; Shi, Beichao; Tian, Yanling; Zhao, Xingyu; Zhang, Dawei

doi:10.1109/tie.2019.2935933

Cited by 64 publications

(20 citation statements)

References 44 publications

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“…They are capable of overcoming the disadvantages of traditional mechanisms including the backlash and assembly error [ 6 , 7 ]. The piezoelectric actuator (PEA) is a normally-used driving component in compliant mechanisms owing to its high resolution, rapid response and ease of compact size [ 8 , 9 , 10 ]. With all outstanding superiorities as mentioned, the piezo-driven compliant mechanism has been one of the promising choices for precision manipulators [ 11 , 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Xie

Cheung

2022

Micromachines

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Compliant mechanisms are popular to the applications of micro/nanoscale manipulations. This paper proposes a novel triaxial parallel-kinematic compliant manipulator inspired by the Tripteron mechanism. Compared to most conventional triaxial compliant mechanisms, the proposed manipulator has the merits of structure compactness and being free of assembly error due to its unique configuration and the utilize of 3D printing technology. The compliance matrix modeling method is employed to determine the input stiffness of the compliant manipulator, and it is verified by finite-element analysis (FEA). Results show that the deviations between simulation works and the derived analytical models are in an acceptable range. The simulation results also reveal that the compliant manipulator can achieve a 16 μm × 16 μm × 16 μm cubic workspace. In this motion range, the observed maximum stress is much lower than the yield strength of the material. Moreover, the dynamic characteristics of the manipulator are investigated via the simulations as well.

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Section: Introductionmentioning

confidence: 99%

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Xie

Cheung

2022

Micromachines

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“…The application areas include positioning and manipulation of micro devices [2], [3], surgical robots [4], micro-robots [5] and so on. MEMS-actuators employ various mechanisms, including piezoelectric [6], electrostrictive [7], electromagnetic [2] and thermo-responsive [3]. Among these, piezoelectric devices have the advantages of fast response and high force output to weight ratio.…”

Section: Introductionmentioning

confidence: 99%

Evaluation Platform for MEMS-Actuated 3D-Printed Compliant Structures

Chen

Kiziroglou

Yeatman

2021

2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Po

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This paper presents experimental results on an evaluation platform for MEMS-actuated compliant structures. A combination of 3 dimensional (3D) flexure design, 3D printing of polymers with controlled stiffness is employed. A modular system design approach allows the interchange and combination of different actuation cantilevers, flexures and structure designs implemented as standalone test parts with minimal assembly requirements. The performance evaluation method includes synchronised electrical excitation and optical displacement measurements, allowing characterisation of motion amplification, dynamic response as well as actuating power transfer. As a demonstrator, a single lever compliant structure was designed, fabricated and tested on the platform to investigate how geometry and material stiffness affect performance. The experimental results reveal that significant improvement of amplification ratio and absolute phase lag can be achieved by selecting a flexure height and material composition suitable for a given application. This method of combined experimental evaluation and custom 3D design and printing is promising for optimising the design of compliant structures for MEMS sensors, actuators and energy transducers with amplified or translated motion capability.

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“…In this paper, we propose an hourglass displacement amplification mechanism based on the principle of triangular amplification, which not only overcomes the shortcomings of the traditional displacement amplification mechanism [28], but also can provide a certain pretension for the piezoelectric actuators and the structure is more compact. For example, Cunman Liang et al [29] and Mingxiang Ling et al [30] designed the diamond displacement amplification mechanism based on the triangle principle, although they have stable amplification performance, the hourglass displacement amplification mechanism has a more compact structure under the same amplification ratio. The displacement amplification ratio and structural parameters of the hourglass displacement amplification mechanism are studied.…”

Section: Introductionmentioning

confidence: 99%

Proposal of an Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Sun

Hao

et al. 2020

Actuators

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Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the 2D micro-positioning platform adopts a nested structure and the displacement magnification mechanism adopts two hourglass displacement magnification mechanisms. The displacement magnification ratio of the hourglass displacement magnification mechanism was studied, and its structural parameters were optimized. Static stiffness analysis and simulation analysis of the micro-positioning platform were carried out. The simulation stiffness of the micro-positioning platform in the XY direction is 46873 N/m and 46832 N/m respectively. The experimental prototype of the micro-positioning platform was built. Through the measurement experiment with the prototype, the maximum stroke of the micro-positioning platform in the XY direction is 489 μm and 493 μm respectively; the maximum coupling ratio in the XY direction is 2.38% and 2.70% respectively. The research indicates that the micro-positioning platform had the characteristics of small size, equal long stroke, equal stiffness and low coupling ratio in the XY direction.

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A 2-DOF Monolithic Compliant Rotation Platform Driven by Piezoelectric Actuators

Cited by 64 publications

References 44 publications

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Evaluation Platform for MEMS-Actuated 3D-Printed Compliant Structures

Proposal of an Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

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