A 104-dB Dynamic Range Transimpedance-Based CMOS ASIC for Tuning Fork Microgyroscopes

Sharma, Ajit; Zaman, M.F.; Ayazi, Farrokh

doi:10.1109/jssc.2007.900282

Cited by 99 publications

(30 citation statements)

References 15 publications

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“…Compared to published solutions [1,2,4,5], this concept needs only two fixed voltages (V 1 , V 2 ) which do not have to be adjusted, since the amplitude regulation is done by a phase-element. Applying these high voltages to the driving stage instead to the middle electrode as done in [4] allows the use of chopper stabilization techniques.…”

Section: Resultsmentioning

confidence: 99%

“…Applying these high voltages to the driving stage instead to the middle electrode as done in [4] allows the use of chopper stabilization techniques. The phase-element is placed between the front-end and driving stage, allowing an implementation in the standard voltage domain, enabling low power designs.…”

Section: Resultsmentioning

confidence: 99%

“…Alternatively to the PLL concept a self-oscillating drive loop can be used. In this case the readout interface is connected to the driving stage in such a way so as to force the system with its resonance frequency into self-oscillation [3][4][5]. In both drive loops an AGC is necessary, regulating the driving stage in order to keep the oscillation amplitude of the primary mass constant.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A phase-based amplitude regulation for gyroscope drive loops

Northemann

Maurer

Ziegler

et al. 2010

Procedia Engineering

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This paper presents a new amplitude regulation for gyroscopes based on phase-shifting. Instead of regulating the AC or DC value of the driving stage in order to maintain a constant primary oscillation, this concept introduces a tunable phase delay into the selfoscillation driving loop. This tunable phase delay is achieved using a Schmitt-Trigger (ST). Compared to conventional amplitude regulation this concept is beneficial, since the high voltages of the driving stage can be set to a constant value and do not have to be adjusted. This reduces the complexity of the analog circuitry enormously and encourages the use of higher driving voltages.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A phase-based amplitude regulation for gyroscope drive loops

Northemann

Maurer

Ziegler

et al. 2010

Procedia Engineering

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show abstract

“…The oscillator circuit, depicted on the left in Fig. 5b is based on a transimpedance amplifier front-end (40 MΩ feedback resistance), followed by an inverting highgain stage that (i) provides the -180 o phase shift to satisfy the Barkhausen criterion on the phase, and (ii) leads to saturation, thus providing the nonlinearity that lowers the loop gain down to 1 after the start-up, so to satisfy also the Barkhausen condition on the modulus [27]. A voltage divider is then used to lower the driving voltage waveform to values compatible with the desired resonator motion (about 3 µm).…”

Section: Tang Resonator and Drive Circuitmentioning

confidence: 99%

A 3-D Micromechanical Multi-Loop Magnetometer Driven Off-Resonance by an On-Chip Resonator

Laghi

Marra

Minotti

et al. 2016

J. Microelectromech. Syst.

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Abstract-The work presents the principle and the complete characterization of a single-chip unit formed by MEMS magnetometers to sense the 3D magnetic field vector, and a Tang resonator. The three sensors, nominally with the same resonance frequency, are operated 200 Hz off-resonance through an AC current whose reference frequency is provided by the resonator, embedded in an oscillating circuit. The sensors gain is increased by adopting a current recirculation strategy using metal strips directly deposited on the structural polysilicon. At a driving value of 100 µArms flowing in series through the three devices, the magnetometers show a sub 185 nT/ √ Hz resolution with a selectable bandwidth up to 50 Hz. Over a ± 5 mT full-scale range, the sensitivity curves show linearity errors lower than 0.2%, with high cross-axis rejection and immunity to external accelerations. Under temperature changes, stability of the 200-Hz difference between the magnetometers and the resonator frequency is within 55 ppm/K. Offset is trimmed down to the µT range, with an overall measured Allan stability of about 100 nT at 20 s observation time.

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“…In Sharma et al (2007) in Georgia Institute of Technology made the further research on the M2-TFG. It still Fig.…”

Section: Research Of Twenty First Centurymentioning

confidence: 99%