A 100 MHz data-rate, 5000-element CCD linear image sensor with reset pulse level adjustment circuit

Miwada, K.; Itô, Hiroshi; Yamamoto, Hironori

doi:10.1109/isscc.1992.200464

Cited by 2 publications

(2 citation statements)

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“…A more compact and lower-capacitance method is illustrated in Fig. 5(b), where the polysilicon gate is connected to the substrate via a buried contact [14]. To form this connection, a contact window is etched in the oxide/nitride gate insulator prior to the polysilicon deposition.…”

Section: Output-circuit Designmentioning

confidence: 99%

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Soft-X-ray CCD imagers for AXAF

Burke

Gregory

Bautz

et al. 1997

IEEE Trans. Electron Devices

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We describe the key features and performance data of a 1024 2 1026-pixel frame-transfer imager for use as a soft-X-ray detector on the NASA X-ray observatory Advanced X-ray Astrophysics Facility (AXAF). The four-port device features a floating-diffusion output circuit with a responsivity of 20 V/e 0 and noise of about 2 e 0 at a 100-kHz data rate. Techniques for achieving the low sense-node capacitance of 5 fF are described. The CCD is fabricated on high-resistivity p-type silicon for deep depletion and includes narrow potential troughs for transfer inefficiencies of around 10 07. To achieve good sensitivity at energies below 1 keV, we have developed a back-illumination process that features low recombination losses at the back surface and has produced quantum efficiencies of about 0.7 at 277 eV (carbon K).

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Section: Output-circuit Designmentioning

confidence: 99%

“…Another method of reducing the parasitic capacitances of the floating diffusion circuit has also been described [14] and is illustrated in Fig. 6.…”

Section: Output-circuit Designmentioning

confidence: 99%