2019 21st European Conference on Power Electronics and Applications (EPE '19 ECCE Europe) 2019
DOI: 10.23919/epe.2019.8915497
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A 1 MHz Wide Bandgap Power Amplifier for High-Precision Applications

Abstract: DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal… Show more

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Cited by 5 publications
(4 citation statements)
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“…Some applications, such as lithography and magnetic resonance imaging (MRI), demand a high-precision and high-linearity [1]. Taking lithography for example, the position error of the moving stage is determined by the nonlinear error of the inverter, requiring less than -100 dB current distortion [2]. The high-linearity requirement is also desired in many other applications, and it raises the research question of what the origin is and what determines the magnitude of the inverter distortion.…”
Section: Introductionmentioning
confidence: 99%
“…Some applications, such as lithography and magnetic resonance imaging (MRI), demand a high-precision and high-linearity [1]. Taking lithography for example, the position error of the moving stage is determined by the nonlinear error of the inverter, requiring less than -100 dB current distortion [2]. The high-linearity requirement is also desired in many other applications, and it raises the research question of what the origin is and what determines the magnitude of the inverter distortion.…”
Section: Introductionmentioning
confidence: 99%
“…For high precision motion applications, the design of current loop is important, such as precision motion platform for semiconductor manufacturing equipment [1], [2]. As the innermost loop of system, the development of current loop can improve the rapidity of the system, and suppress the influence of nonlinear factor.…”
Section: Introductionmentioning
confidence: 99%
“…The sine-pulse-width-modulated (SPWM) H-bridge inverter is widely used in industry, such as lithography and magnetic resonance imaging (MRI). Those applications demand high precision and low distortion on the inverter output [1,2]. In practice, a certain dead-time should be applied to the H-bridge inverter to prevent short circuit.…”
Section: Introductionmentioning
confidence: 99%