A 1.3 Milliwatts Electrostatic Vibrational Energy Harvester with Minimal Reactive Power through Reduced Internal Stray Capacitances

Honma, Hiroaki; Tohyama, Yukiya; Toshiyoshi, Hiroshi

doi:10.1109/transducers.2019.8808249

Cited by 6 publications

(6 citation statements)

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“…As the first step in the analysis, the developed model was examined with a sinusoidal vibration input, as it was the input condition used in the experiments of Honma et al (2019). There were two aims in this step.…”

Section: Resultsmentioning

confidence: 99%

“…Figure 1 illustrates a conceptual sketch of an electretbased VEH with curved beam hinges. The device configuration, more or less, follows that of Honma et al (2018Honma et al ( , 2019. A proof mass (m) is to be placed on top of the moving part, but omitted in the sketch.…”

Section: Methodsmentioning

confidence: 99%

“…Power spectral density was also calculated by using FFT (fast Fourier transform) function of the MATLAB Ò . Table 1 summarizes the values of the design parameters used in the analysis, which is based on the device reported by Honma et al (2019). Single crystalline silicon (c-Si) was considered as the structural material, which is one of the most frequently used materials in microelectromechanical systems (MEMS).…”

Section: Methodsmentioning

confidence: 99%

“…Electrostatic transduction is also advantageous at a small scale with higher power density. Various configurations have been examined, including a rotation type (Boland et al, 2003), a parallel-plate type (Torres and Rincon-Mora, 2006;Zhang et al, 2018), and a comb-drive type (Fu and Suzuki, 2014;Hagiwara et al 2012;Honma et al, 2018Honma et al, , 2019Meninger et al, 1999;Nguyen et al, 2013;Sterken et al, 2003). The comb-drive type is particularly interesting due to its relatively wide motion range.…”

Section: Introductionmentioning

confidence: 99%

“…Fu and Suzuki (2014) presented a VEH that combines an area-changing mode and a gap-changing mode, aiming to cover a wide range of vibration strengths. VEHs reported by Honma et al (2018Honma et al ( , 2019 feature a balanced comb-drive configuration, aiming at improved conversion efficiency at low vibration strengths. It is also noteworthy that in their work, the formation of electrets was realized by polarizing doped oxides on the sides of the fingers.…”

Section: Introductionmentioning

confidence: 99%

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Analysis of electret-based vibration energy harvesting devices with curved-beam hinges

Hah

2023

Journal of Intelligent Material Systems and Structures

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Recently, vibration energy harvesting devices have gained growing interests. One of the main requirements for them is a broad bandwidth owing to stochastic spectral characteristics of the general vibration sources. Among various approaches for wide bandwidth, curved-beam hinges are quite attractive due to their simple structures. Although there have been several reports on curved beams, a more detailed study is needed. The device under study is an electret-based one with balanced comb-drive configuration. The whole system is modeled by using nonlinear stochastic differential equations. The numerical analysis results show that there is an optimum curve height for maximum power output, which depends on various conditions, such as external vibration strength, comb-drive dimensions, and initial electret charges. At the external acceleration magnitude of 0.02 g and 0.05 g, the device with curved beams can produce up to 2.9 times and 4.8 times higher power output, respectively, than one with straight beams for given device geometries. To the contrary, at lower and higher vibration magnitudes, straight-beam devices harvest more energy than curved-beam ones. Therefore, it can be concluded that the curved beam height needs to be carefully determined based on the conditions of the application, especially on the characteristics of the external vibration sources.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%