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Babayan, S E; Ding, Ge; Nowling, G R; Yang, Xian-Jie; Hicks, Robert F.

doi:10.1023/a:1014847526292

Cited by 50 publications

(46 citation statements)

References 36 publications

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“…2͑e͒ and the maximum ion density of 3.5ϫ10 12 cm Ϫ3 in Fig. 2͑f͒ also broadly agree with experimental measurements 2,14,15 and numerical modeling results. 5,16,19 On the other hand, the total current density of 0.18 A/cm 2 needed to establish a cathode electric field of about 40 kV/cm is one magnitude lower than that measured in a rod-to-plane helium plasma experiment at atmospheric pressure.…”

Section: Structural Characteristics Of DC Apgdsupporting

confidence: 85%

“…The main thrust of this field has so far been extensive exploration of their applications, although some of their fundamental properties were characterized experimentally including their discharge dynamics, [3][4][5][6] optical emission, 1,13 and densities of charged particles and excited species. 14,15 To a lesser extent they have also been studied numerically often based on hydrodynamics approximation, focusing on discharge dynamics. 5,7,16 Results of these numerical studies agree favorably with the macroscopic features of measured discharge current and voltage, 5,7 so hydrodynamic models offer useful theoretical tools to understand atmospheric glow discharges.…”

Section: Introductionmentioning

confidence: 99%

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Cathode fall characteristics in a dc atmospheric pressure glow discharge

Shi

Kong

2003

Journal of Applied Physics

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Atmospheric pressure glow discharges are attractive for a wide range of material-processing applications largely due to their operation flexibility afforded by removal of the vacuum system. These relatively new atmospheric plasmas are nonequilibrium plasmas with gas temperature around 100°C and electron temperature in the 1-10 eV range. Their appearance is characteristically diffuse and uniform, and their temporal features are repetitive and stable. Of the reported numerical studies of atmospheric glow discharges, most are based on the hydrodynamic approximation in which electrons are assumed to be in equilibrium with the local electric field. Spectroscopic and electrical measurements suggest however that the cathode fall region is fundamentally nonequilibrium. To this end we consider a hybrid model that treats the cathode fall region kinetically but retains a hydrodynamic description for the region between the thin cathode fall layer and the anode. Using this hybrid model, a helium discharge system excited at dc is studied numerically for a very wide current density range that spans from Townsend dark discharge, through normal glow discharge, to abnormal glow discharge. Numerical results confirm many distinct characteristics of glow discharges and compare well with that of low-pressure glow discharges. Generic relationships, such as that between the electric field and the current density, are also established and are in good agreement with experimental data. This hybrid model is simple and insightful as a theoretical tool for atmospheric pressure glow discharges.

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Section: Structural Characteristics Of DC Apgdsupporting

confidence: 85%

Section: Introductionmentioning

confidence: 99%

Cathode fall characteristics in a dc atmospheric pressure glow discharge

Shi

Kong

2003

Journal of Applied Physics

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“…The rising V -I characteristic is also typical of that of most reported rf APGD experiments. [12][13][14][15][16][17][18][19][20] This abnormal glow phase ended at point D at which sheath breakdown was triggered and the breakdown event lasted from D to F. During this transition period, the plasma underwent a voltage reduction of 43% and a current increment of 72%. If multiple sheath breakdowns were allowed to occur in succession, via a recovery phase between two adjacent breakdowns, later breakdown events could result in current reduction rather than current increment.…”

Section: Voltage and Current Wave Formsmentioning

confidence: 99%

“…From a practical standpoint, rf APGDs are attractive because of their low breakdown voltage. 12 Over the past 3 years some of their plasma properties have been investigated including emission spectrum, 13,14 vibrational and rotational temperature, 12,15,16 densities of excited species, 17 and charged particles, 18 and plasma dynamics. 12,19 Yet many more aspects of their fundamental characteristics remain to be unraveled, observed and characterized before a full understanding is achieved.…”

Section: Introductionmentioning

confidence: 99%

“…Our study suggests that similar to the ␣ mode these two additional modes have a diffuse and uniform appearance with the ionized gas at near room temperature and that the ␣ mode, hitherto considered as the only rf APGD mode, is essentially an abnormal glow mode. So rf APGD have a much wider operation range than previously believed [12][13][14][15][16][17][18][19][20] and this greater operation range allows rf APGD to be flexibly operated for many applications. To provide further insights into these three modes, we study their mode transition mechanism also.…”

Section: Introductionmentioning

confidence: 99%

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Three modes in a radio frequency atmospheric pressure glow discharge

Shi

Deng

Hall³

et al. 2003

Journal of Applied Physics

117

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Fundamentally not requiring a vacuum chamber, atmospheric pressure glow discharges (APGDs) offer an exciting prospect for a wide range of material processing applications. To characterize their operation and establish their operation range, a radio frequency (rf) APGD is studied experimentally with measurement of discharge voltage, current, dissipated plasma power and plasma impedance. Different from the current understanding that rf APGD are operative only in the abnormal glow mode, we show the presence of two additional modes namely the normal glow mode and the recovery mode. It is shown that all three modes are spatially uniform and possess key characteristics of a glow discharge. So rf APGD have a much wider operation range than previously believed. To provide further insights, we investigate the transition from the abnormal glow mode to the recovery mode. It is established that the cause responsible for the mode transition is sheath breakdown, a phenomenon that is known in low- and moderate-pressure glow discharges but has not been reported before for atmospheric-pressure glow discharges. Finally we demonstrate that plasma dynamics, hence plasma stability, in these three modes are influenced crucially by the impedance matching between the plasma rig and the power source.

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Atmospheric and Vacuum Plasma Treatments of Polymer Surfaces for Enhanced Adhesion in Microelectronics Packaging

Zhang

Wong

et al. 2014

Adhesion in Microelectronics

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Untitled

Cited by 50 publications

References 36 publications

Cathode fall characteristics in a dc atmospheric pressure glow discharge

Cathode fall characteristics in a dc atmospheric pressure glow discharge

Three modes in a radio frequency atmospheric pressure glow discharge

Atmospheric and Vacuum Plasma Treatments of Polymer Surfaces for Enhanced Adhesion in Microelectronics Packaging

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