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Cited by 51 publications
(62 citation statements)
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References 23 publications
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“…The water molecules gotten energy could form Á OH and H 2 O 2 through the reaction (4) and (5). At the same time, the gas molecules in the discharge region were dissociated or excited by high-energy electrons to form gas plasma [23][24][25][26][27][28]:…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The water molecules gotten energy could form Á OH and H 2 O 2 through the reaction (4) and (5). At the same time, the gas molecules in the discharge region were dissociated or excited by high-energy electrons to form gas plasma [23][24][25][26][27][28]:…”
Section: Resultsmentioning
confidence: 99%
“…Because the slim gas flow was surrounded by water, the excited species were trapped immediately by the water molecules [23][24][25][26][27][28]:…”
Section: Resultsmentioning
confidence: 99%
“…Under atmospheric pressure, the charged particle density decays very rapidly in the afterglow, whereas the atoms and radicals generated by the plasma are relatively long lived. [60,65,73] The chemical precursor reacts with the atoms and radicals, and then impinges on the substrate and deposits the thin film. …”
Section: Plasma Source Designmentioning
confidence: 99%
“…[65,67,71] The apparatus used in these experiments consists of two parallel metal plates separated by a gap of 1.6 mm. Helium, and oxygen or nitrogen, flow through these electrodes and are ionized with RF power at 13.…”
Section: Discharge Chemistrymentioning
confidence: 99%
“…On the basis of earlier investigations [21][22][23] it was shown that N ( 4 S) atoms formed in previous discharge have a very large recombination time. Catalytic recombination of these atoms on the cathode leads to formation of N 2 (B) molecules [24,25]. Spontaneous de-excitation N 2 (B) molecules leads to formation of N 2 (A) metastable molecules [26].…”
Section: The Influence Of Afterglow Period and Overvoltage On Electrimentioning
confidence: 99%