There are still several problems to be scientically solved for thegconventionalh solgel ceramic coating technique to be utilized in industrial scale. Based on the recognition, the author's group studied the stress evolution and crack formation in gelderived lms and the evolution of radiative striations in spincoating lms. Possible modication of the solgel technique has also been made for realizing thicker lms via non cycled deposition. First, the residual stress was measured on alkoxidederived silica and titania lms deposited on silica glass substrate. The residual stress increased with increasing heattreatment tempera ture due to densication. It was demonstrated that the stress in lms is not a simple function of the dier ence in thermal expansion coecient between the lm and the substrate, but is greatly aected by the processing parameters including the amount of water for hydrolyzing alkoxides and the kinds of the chelat ing agents. Second, in situ observation was conducted on silica and titania gel lms deposited on single crystal silicon substrates. Macroscopic cracking occurred in the heatingup stage, suggesting that the cracks are formed by tensile stress generated in lms due to densication. Also, such cracking was found to occur at lower temperatures when the lms are thick or heated at lower rates. Third, expecting that organic polymers with amide groups like polyvinylpyrrolidone (PVP) can promote structural relaxation and can sup press stress evolution on heating, PVPassisted solgel thin lm deposition was proposed. Incorporating PVP in coating solutions, crackfree ceramic thin lms including BaTiO 3 , PZT and BaBi 4 Ti 4 O 15 lms over submicron or micron in thickness could be prepared via noncycled deposition. Finally, radiative striations were quantitatively evaluated by surface roughness measurement, and the eects of the processing parameters on striation evolution were studied. The height and spacing of striations were found to be in creased with decreasing spinning rate and with increasing sol viscosity. Striations were also found to be formed even without the rotation of the substrate, suggesting that the substrate rotation is not a necessary condition for evolution of striations. On the assumption that the mechanism of the evolution of striations is the same irrespective of the presence or absence of the substrate rotation, in situ observation of the evolu tion of striations was conducted on a sol layer placed on a stationary substrate. It was observed that stria tions are formed on solvent evaporation after the sol was spread, not on proceeding of the sol front towards the outer.