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Cited by 19 publications
(6 citation statements)
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“…[59] The 441 cm À 1 band can also be assigned to β-Si 3 N 4 . [60] These findings align with the previous measurements and corroborate that the sample prepared in N 2 is a mixture of the unreacted silica precursor and silicon nitride.…”
Section: Carbothermal Reduction To Sicsupporting
confidence: 91%
“…[59] The 441 cm À 1 band can also be assigned to β-Si 3 N 4 . [60] These findings align with the previous measurements and corroborate that the sample prepared in N 2 is a mixture of the unreacted silica precursor and silicon nitride.…”
Section: Carbothermal Reduction To Sicsupporting
confidence: 91%
“…Nowadays it is widely used in micro- and nanoelectromechanical systems (MEMS and NEMS) . Silicon nitride has excellent fracture toughness and is chemically inert, which presents opportunities for micro/nano devices with high corrosion resistance and high mechanical strength, as alternatives to silicon-based devices . Among other possibilities, this enables the fabrication of microsieves with high porosity and highly homogeneous pore-size distributions .…”
Section: Introductionmentioning
confidence: 99%
“…45 Silicon nitride has excellent fracture toughness and is chemically inert, which presents opportunities for micro/nano devices with high corrosion resistance and high mechanical strength, as alternatives to silicon-based devices. 46 Among other possibilities, this enables the fabrication of microsieves with high porosity and highly homogeneous pore-size distributions. 47 Microsieves therefore have a high flux and excellent selectivity in microfractionation processes.…”
Section: Introductionmentioning
confidence: 99%
“…Films of this material inhibit diffusion of water, oxygen, and sodium ions, and are widely used as a passivation layer in integrated circuits . Its popularity is mainly motivated by its superior physical and chemical inertness, as it provides an excellent alternative to silicon dioxide in microelectronic and membrane applications. …”
Section: Introductionmentioning
confidence: 99%