b) FIGURE 1. (a) Side view schematic of the integrated short-cavity DBR laser-modulator, illustrating the Gain, DBR, and EAM sections. (b) Epitaxial base structure. To the right illustrates the intermixing process used: (i) surface fluorination followed by SiO 2 deposition; (ii) removal of the SiO 2 and fluorination layer; (iii) deposition of a second SiO 2 layer; (iv) RTA to drive vacancies down through the multiple quantum well active region.Abstract: Short-cavity, 980nm DBR lasers with integrated EAMs were designed and fabricated using a quantum well intermixing processing platform. RF bandwidths of 16GHz were achieved and open eyes at 10Gb/s were observed with >7dB dynamic extinction.
INTRODUCTIONFor photonics to replace electronics in applications such as board-to-board and chip-to-chip level interconnects, there is a clear need for increased speed and efficiency. Vertical cavity lasers have demonstrated high efficiencies, but operation to higher data rates is challenging [1]. We have previously demonstrated high efficiency, short-cavity distributed Bragg reflector (DBR) lasers at 1.55 µm with integrated, high bandwidth (25 GHz) electro-absorption modulators (EAM) [2]. By using a quantum well intermixing (QWI) integration platform, the laser and modulator can be simultaneously optimized for high performance. Recently, 980 nm DBR lasers with quantum well intermixed passive sections have been demonstrated with output powers up to 400 mW [3]. Moreover, intermixed quantum well (QW) EAMs have also shown promise to extend data rates up to 40 Gb/s and beyond [4]. Here, we present a short-cavity, 980 nm, DBR laser using a QWI platform in the InGaAs/GaAs/AlGaAs material system, monolithically integrated with a high-speed EAM demonstrating 16 GHz of 3dB bandwidth.