80 K cryogenic stage for ice lithography

Haque, Rubaiyet Iftekharul; Waafi, Affan Kaysa; Jaemin, Kim; Briand, D.; Han, Anpan

doi:10.1016/j.mne.2021.100101

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Cited by 3 publications

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“…The patterns are severely damaged for the highest dose, and we observed significant material losses. Because we used a very large cold finger to trap water near the sample [6,17], we did not observe significant interference caused by water contamination [16]. Fig.…”

Section: Resultsmentioning

confidence: 96%

See 1 more Smart Citation

Ice lithography using tungsten hexacarbonyl

Haque

Waafi

Chang

et al. 2023

Micro and Nano Engineering

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Section: Resultsmentioning

confidence: 96%

“…IL is performed using a custom-made ice lithography system based on a Hitachi FlexSEM 1000 with a customized cryostage and gas injection system (GIS) [17]. Tungsten hexacarbonyl (W(CO) 6 , 99%) is purchased from Acros Organic, Thermo Fisher Scientific.…”

Section: Methodsmentioning

confidence: 99%